Method for a doublesided coating of optical substrates
First Claim
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1. An arrangement for coating at least one substrate, comprising:
- a vacuum chamber having an inlet for gas and an outlet from which a vacuum can be drawn;
gas supply means connected to the gas inlet for supplying selected gases to the vacuum chamber;
vacuum means connected to the vacuum inlet for drawing the vacuum in the vacuum chamber;
an electrically conductive substrate holder mounted for rotation around an axis in the vacuum chamber and having opposite sides;
at least one glow electrode in the vacuum chamber at a location with respect to the axis for facing both sides of the substrate holder for at least partly covering both sides of the substrate holder; and
at least one thermal evaporation source in the vacuum chamber for supplying a thermally evaporated material for deposit on a substrate held by the substrate holder.
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Abstract
To reach a better production sequence and an increased quality for plasma polymerization coatings and evaporation coatings on both sides of optical lenses, it is suggested to proceed with the deposition of the layers within an especially suitable apparatus configuration where the plasma polymerization coating is deposited simultaneously on both sides of the lenses.
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Citations
4 Claims
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1. An arrangement for coating at least one substrate, comprising:
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a vacuum chamber having an inlet for gas and an outlet from which a vacuum can be drawn; gas supply means connected to the gas inlet for supplying selected gases to the vacuum chamber; vacuum means connected to the vacuum inlet for drawing the vacuum in the vacuum chamber; an electrically conductive substrate holder mounted for rotation around an axis in the vacuum chamber and having opposite sides; at least one glow electrode in the vacuum chamber at a location with respect to the axis for facing both sides of the substrate holder for at least partly covering both sides of the substrate holder; and at least one thermal evaporation source in the vacuum chamber for supplying a thermally evaporated material for deposit on a substrate held by the substrate holder. - View Dependent Claims (2, 3, 4)
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Specification