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Method for a doublesided coating of optical substrates

  • US 5,211,759 A
  • Filed: 02/26/1992
  • Issued: 05/18/1993
  • Est. Priority Date: 03/05/1991
  • Status: Expired due to Fees
First Claim
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1. An arrangement for coating at least one substrate, comprising:

  • a vacuum chamber having an inlet for gas and an outlet from which a vacuum can be drawn;

    gas supply means connected to the gas inlet for supplying selected gases to the vacuum chamber;

    vacuum means connected to the vacuum inlet for drawing the vacuum in the vacuum chamber;

    an electrically conductive substrate holder mounted for rotation around an axis in the vacuum chamber and having opposite sides;

    at least one glow electrode in the vacuum chamber at a location with respect to the axis for facing both sides of the substrate holder for at least partly covering both sides of the substrate holder; and

    at least one thermal evaporation source in the vacuum chamber for supplying a thermally evaporated material for deposit on a substrate held by the substrate holder.

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