Scanning laser measurement system
First Claim
Patent Images
1. A thickness measurement system comprising:
- means for imaging an object, wherein the imaging means generates a plurality of data values representing distances from the imaging means to respective points on the object; and
means for processing the data values generated by the imaging means, wherein the processing means comprises;
means for protruding a measured 21/2-D model of a surface of the object, comprising means for making a first object origin congruent with a second object origin, the first object origin being determined by first data points collected by the imaging means from a first position relative to the object, the second object origin being determined by second data points collected by the imaging means from a second position relative to the object, whereby data values collected by the imaging means from the first position may be combined with data values collected by the imaging means from the second position to produce the measured 21/2-D model;
means for entering a predetermined 21/2-D mathematical model of the object; and
first comparing means for comparing the measured 21/2-D model to the predetermined 21/2-D model to determine the object'"'"'s thickness.
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Abstract
A scanning measurement system comprises a device for imaging an object, wherein the imaging device generates a plurality of data values representing distances from the imaging device to respective points on the object, and a device for processing the data values generated by the imaging device, wherein the processing device comprises a device for entering a predetermined 21/2-D mathematical model of the object, and a device for comparing the data values to the model to determine the object'"'"'s thickness.
96 Citations
20 Claims
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1. A thickness measurement system comprising:
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means for imaging an object, wherein the imaging means generates a plurality of data values representing distances from the imaging means to respective points on the object; and means for processing the data values generated by the imaging means, wherein the processing means comprises; means for protruding a measured 21/2-D model of a surface of the object, comprising means for making a first object origin congruent with a second object origin, the first object origin being determined by first data points collected by the imaging means from a first position relative to the object, the second object origin being determined by second data points collected by the imaging means from a second position relative to the object, whereby data values collected by the imaging means from the first position may be combined with data values collected by the imaging means from the second position to produce the measured 21/2-D model; means for entering a predetermined 21/2-D mathematical model of the object; and first comparing means for comparing the measured 21/2-D model to the predetermined 21/2-D model to determine the object'"'"'s thickness. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of measuring the thickness of an object, said method comprising the steps of:
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providing an electro-optic distance measuring device capable of transmitting a radiation signal of narrow frequency bandwidth, receiving a portion of said transmitted radiation signal reflected by said object, and determining by phase comparison of the transmitted and received signals the distance from the electro-optical distance measuring device to a point of reflection on the object; determining a multitude of distance values to respective points on said object; modelling by a 21/2-D modelling process the object'"'"'s actual surface from the multitude of distance values, the step of modelling including the step of; making a first object origin congruent with a second object origin, the first object origin being determined by first data points collected by the imaging means from a first position relative to the object, the second object origin being determined by second data points collected by the imaging means from a second position relative to the object, whereby data values collected by the imaging means from the first position may be combined with data values collected by the imaging means from the second position to produce the 21/2-D model of the object'"'"'s actual surface; comparing the object'"'"'s modelled actual surface with a predetermined 21/2-D modelled object surface; and outputting the results of said comparison. - View Dependent Claims (17, 18, 19, 20)
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Specification