Angular rate sensor having a tuning-fork structure

• US 5,212,985 A
• Filed: 01/18/1991
• Issued: 05/25/1993
• Est. Priority Date: 01/18/1990
• Status: Expired due to Fees

• Current Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Inventors: Ueda, Kazumitsu, Ichinose, Toshihiko, Terada, Jiro, Takenaka, Hiroshi
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US07/643,115
• Time in Patent Office: 858 Days
• Field of Search: 73/505, 310/329, 310/370
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719

Abstract

An angular rate sensor of the type, using oscillation of piezoelectric elements, which includes a pair of sensor elements each including a vibratory piezoelectric detecting element and a vibratory piezoelectric drive element joined together by a joint member in longitudinal alignment and oriented substantially at right angles relative to each other, and a resilient joint member joining the pair of sensor elements at respective free ends of the drive elements so as to form, jointly with the sensor elements, a tuning-fork structure. The turning-fork structure has an improved joint structure between each of the driving elements and the resilient joint member, which has a thickness to width ratio of approximately 3:10 to 7:10 to enable the angular rate sensor to have a low resonance impedance and stable performance characteristics.

Claims

1. An angular rate sensor comprising:

a pair of sensor elements each including a vibratory piezoelectric detecting element and a vibratory piezoelectric drive element joined together end to end by a joint member in such a manner that said detecting and drive elements are oscillatable perpendicularly relative to each other; and

a resilient joint member joining respective free ends of said drive elements so as to form, jointly with said sensor elements, a tuning-fork structure having a longitudinal axis, said resilient lint member having a pair of opposite bonding surfaces facing the respective drive elements, each of said bonding surfaces having a first extent in a direction parallel to said longitudinal axis and a second extent in a direction perpendicular to said longitudinal axis of said tuning-fork structure, the ratio of said first extent to said second extent being in the range of 3;

10 to 7;

10.

2. An angular rate sensor according to claim 1, wherein said resilient joint member is a rectangular body having two opposite side faces defining said bonding surfaces.

3. An angular rate sensor comprising:

a pair of sensor elements each including a vibratory piezoelectric detecting element and a vibratory piezoelectric drive element joined together end to end by a joint member in such a manner that said detecting and drive elements are oscillatable perpendicularly relative to each other;

a resilient joint member joining respective free ends of said drive elements so as to form, jointly with said sensor elements, a tuning-fork structure having a longitudinal axis, said resilient joint member having a pair of opposite bonding surfaces facing the respective drive elements, each of said bonding surfaces having a first extent in a direction parallel to said longitudinal axis and a second extent in a direction perpendicular to said longitudinal axis of said tuning-fork structure, the ratio of said first extent to said second extent being in the range of 3;

10 to 7;

10; and

wherein said resilient joint member includes a rectangular body and a pair of thin fins integral with said body and extending in a common direction from two opposite edges of said body, said rectangular body having two opposite side faces defining said bonding surfaces, said fins extending flush with said bonding surfaces, respectively.

4. An angular rate sensor comprising:

a pair of sensor elements each including a vibratory piezoelectric detecting element and a vibratory piezoelectric drive element joined together end to end in such a manner that said detecting and drive elements are oscillatable perpendicularly relative to each other; and

a resilient joint member joining respective free ends of said drive elements so as to form, jointly with said sensor elements, a turning-fork structure having a longitudinal axis, said resilient joint member having a pair of opposite bonding surfaces facing the respective drive elements, each of said bonding surfaces having a first extent in a direction along said longitudinal axis and a second extent in a direction parallel to said longitudinal axis of said tuning-fork structure, the ratio of said first extent to said second extent being in the range of 3;

10 to 7;

10.

5. An angular rate sensor according to claim 4, wherein said resilient joint member is a rectangular body having two opposite side faces defining said bonding surfaces.

6. An angular rate sensor comprising:

a pair of sensor elements each including a vibratory piezoelectric detecting element and a vibratory piezoelectric drive element joined together end to end in such a manner that said detecting and drive elements are oscillatable perpendicularly relative to each other; and

a resilient joint member joining respective free ends of said drive elements so as to form, jointly with said sensor elements, a turning-fork structure having a longitudinal axis, said resilient joint member having a pair of opposite bonding surfaces facing the respective drive elements, each of said bonding surfaces having a first extent in a direction along said longitudinal axis and a second extent in a direction parallel to said longitudinal axis of said turning-fork structure, the ratio of said first extent to said second extent being in the range of 3;

10 to 7;

10; and

wherein said resilient joint member includes a rectangular body and a pair of thin fins integral with said body and extending in a common direction from two opposite edges of said body, said rectangular body having two opposite side faces defining said bonding surfaces, said fins extending flush with said bonding surfaces, respectively.