Multi-dimensional high-resolution probe for semiconductor measurements including piezoelectric transducer arrangement for controlling probe position

• US 5,214,389 A
• Filed: 01/06/1992
• Issued: 05/25/1993
• Est. Priority Date: 01/06/1992
• Status: Expired due to Term

• Current Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Cao, Beatrice M., Carrejo, Juan P.
• Primary Examiner(s): Strecker, Gerard R.
• Assistant Examiner(s): DO, DIEP N
• Application Number:
  US07/817,209
• Time in Patent Office: 505 Days
• Field of Search: 324/691, 324/713, 324/715, 324/716, 324/719, 324/724, 324/72.5, 324/158 D, 324/158 P, 324/158 R, 250/306, 250/307
• US Class Current: 324/719
• CPC Class Codes: G01R 1/06705 Apparatus for holding or moving single probes for moving multiple probe heads or ICs under test G01R31/2886
• CPC Class Codes: Y10S 977/837 Piezoelectric property of nanomaterial
• CPC Class Codes: Y10S 977/849 with scanning probe
• CPC Class Codes: Y10S 977/86 Scanning probe structure
• CPC Class Codes: Y10S 977/861 Scanning tunneling probe
• CPC Class Codes: Y10S 977/872 Positioner
• CPC Class Codes: Y10S 977/874 Probe tip array

Abstract

A probe which is positioned in at least one axis by a piezoelectric transducer is provided. One or more piezoelectric transducers control position of the probe with respect to another probe, with respect to a sample surface, or with respect to a previous position of the probe itself. A method for measuring spreading resistance is provided where the distance between two probes is reproducibly controlled in the range of a few angstroms by measuring tunneling current between the two probes, and electrical contact between the two probes and a sample is reproducibly provided by monitoring current between the probes and the sample.

Claims

1. A multi-dimensional high-resolution probe comprising:

a first probe;

a first piezoelectric transducer attached to the first probe, wherein the first piezoelectric transducer is capable of moving the fist probe in at least one dimension;

a first means for applying a variable electric field to the first piezoelectric transducer;

a second probe;

a second piezoelectric transducer attached to the second probe;

a second means for applying a variable electric field to the second piezoelectric transducer;

a means for applying current between the first and second probes; and

a means for measuring voltage between the first and second probes.

2. The multi-dimensional high-resolution probe of claim 1 further comprising a means for calculating spreading resistance by dividing the measured voltage by the measured current.

3. The multi-dimensional high-resolution probe of claim 1 further comprising a means for detecting the relative position of at least one of the probes with respect to a conductive or semiconductive body including:

a means for applying a bias voltage between the at least one probe and the conductive or semiconductive body; and

a means for monitoring tunneling current between the at least one probe and the conductive or semiconductive body, wherein relative position is proportional to the monitored tunneling current.

4. The multi-dimensional high-resolution probe of claim 1 wherein the first and second piezoelectric transducers are capable of three dimensional motion.

5. The multi-dimensional high-resolution probe of claim 1 further comprising a third piezoelectric transducer attached to the first probe, wherein the first and third piezoelectric transducers are attached to each other and to the first probe to allow moving the first probe in at least two dimensions.

6. The multi-dimensional high-resolution probe of claim 5 further comprising a fourth piezoelectric transducer attached to the first probe, wherein the first, third, and fourth piezoelectric transducers are attached to each other and the first probe to allow moving the first probe in at least three dimensions.

7. The multi-dimensional high-resolution probe of claim 6 wherein each of the first, third, and fourth piezoelectric transducers are electrically coupled to a means for applying an electric field.

8. The multi-dimensional high-resolution probe of claim 1 further comprising a means for detecting the relative position of the first probe with respect to the second probe including:

a means for applying bias voltage between the first and second probes, wherein the means of applying a bias voltage drives a tunneling current between the first and second probes; and

a means for monitoring the tunneling current between the first and second probes, wherein distance between the probes is proportional to the measured tunneling current.

9. A multi-dimensional high-resolution probe for semiconductor spreading resistance measurements comprising:

a firs probe;

a first piezoelectric transducer attached to the first probe;

a first control circuit for applying a variable electric field to the first piezoelectric transducer;

a second probe;

a second piezoelectric transducer attached to the second probe; and

a second control circuit for applying a variable electric field to the second piezoelectric transducer;

a first bias voltage source coupled between the first probe and a semiconductor sample, wherein the first bias voltage source drives a tunneling current between the first probe and the semiconductor sample;

a first means for monitoring the tunneling current between the first probe and the semiconductor sample;

a second bias voltage source coupled between the second probe and the semiconductor sample, wherein the second bias voltage source drives a tunneling current between the second probe and the semiconductor sample;

a means for monitoring the tunneling current between the second probe and the semiconductor sample;

a third bias voltage source coupled between the first and second probes, wherein the third bias voltage source drives a tunneling current between the first and second probes;

a means for monitoring the tunneling current between the first and second probes;

a means for measuring spreading resistance between the first and second probes when the probes are in electrical contact with the semiconductor sample.

10. A method for making high-resolution spreading resistance measurements comprising the steps:

providing a sample surface to be measured;

providing first and second probes;

moving the first probe in a vertical Z-axis to a coarse distance over the sample surface;

moving the second probe in the Z-axis to a coarse distance over the sample surface;

monitoring a first tunneling current between the first and second probes;

moving the first and second probes in a Y-axis towards each other until the first tunneling current reaches a first predetermined magnitude;

monitoring a second current between at least one of the probes and the sample surface;

moving the first and second probes towards the sample surface in the Z-axis until the second current reaches a second predetermined magnitude;

measuring spreading resistance between the first and second probes; and

moving the probes in an X-axis, wherein the steps of measuring spreading resistance and moving the probes in an X-axis are performed more than one time.

11. The method of claim 10 further comprising the steps of lifting the probes to the coarse position before the step of moving the probes in the X-axis, and moving the probes towards the sample surface in the Z-axis until the second current reaches the second predetermined value after the step of moving the probes in the X-axis.

12. The method of claim 10 wherein the sample surface comprises a semiconductor body having diffused junctions therein, wherein the sample surface is provided by bevelling the semiconductor body to expose the diffused junctions.

13. The method of claim 10 further comprising the steps of moving the probes to a new location in the Y-axis before the step of moving the probes in the X-axis, and repeating the step of measuring spreading resistance between the probes while the probes are in the new location in the Y-axis.

14. The method of claim 10 wherein the second predetermined magnitude of the second current correlates to ohmic contact between the first and second probes and the sample surface.