Electrochemical gas sensor
First Claim
1. An electrochemical gas sensor comprising an insulating substrate an active and counter electrodes mutually spaced and disposed on the same surface of said insulating substrate, said active and counter electrodes having respectively reactive portions, at least said reactive portion of said active electrode having on its surface a plurality of projections, a reference electrode made of gold spaced from said active and counter electrodes and having a reactive portion, a solid electrolyte layer formed to cover at least said reactive portions of said active, counter and reference electrodes including said projections of the active electrode, a gas barrier overlayer provided above said solid electrolyte layer, said overlayer having one small ventilating hole for providing gas permeability and for reducing ventilation to the electrodes to stabilize their sensibility to gases and an alumina filter layer disposed between the gas barrier overlayer and said solid electrolyte layer.
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Accused Products
Abstract
An electrochemical gas sensor comprises an insulating substrate, active and counter electrodes disposed on a surface of the insulating substrate mutually spaced to have respectively reactive portions, a reference electrode spaced from the active and counter electrodes and having a reactive portion, and a solid electrolyte layer formed to cover the reactive portions of the active, counter and reference electrodes, whereby the sensitivity to gases of the active electrode is improved and stabilized.
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Citations
16 Claims
- 1. An electrochemical gas sensor comprising an insulating substrate an active and counter electrodes mutually spaced and disposed on the same surface of said insulating substrate, said active and counter electrodes having respectively reactive portions, at least said reactive portion of said active electrode having on its surface a plurality of projections, a reference electrode made of gold spaced from said active and counter electrodes and having a reactive portion, a solid electrolyte layer formed to cover at least said reactive portions of said active, counter and reference electrodes including said projections of the active electrode, a gas barrier overlayer provided above said solid electrolyte layer, said overlayer having one small ventilating hole for providing gas permeability and for reducing ventilation to the electrodes to stabilize their sensibility to gases and an alumina filter layer disposed between the gas barrier overlayer and said solid electrolyte layer.
Specification