Opto-mechanical automatic focusing system and method

• US 5,216,235 A
• Filed: 04/24/1992
• Issued: 06/01/1993
• Est. Priority Date: 04/24/1992
• Status: Expired due to Term

• Current Assignee: AMRAY, Inc. (KLA Corporation)
• Original Assignee: AMRAY, Inc. (KLA Corporation)
• Inventors: Lin, Shih-Chao
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Messinger, Michael
• Application Number:
  US07/873,361
• Time in Patent Office: 403 Days
• Field of Search: 250/561, 250/201.3, 250/201.4, 250/201.5, 250/201.6, 250/216, 250/234-236, 250/559-560, 250/548, 250/571, 250/306, 250/311, 356/375, 356/445, 219/121.78-121.81, 219/121.83
• US Class Current: 250/201.6
• CPC Class Codes: G01B 11/026 by measuring distance between sensor and object G01B11/0608 takes precedence
• CPC Class Codes: G02B 7/28 Systems for automatic generation of focusing signals
• CPC Class Codes: H01J 2237/20235 Z movement or adjustment
• CPC Class Codes: H01J 2237/21 Focus adjustment
• CPC Class Codes: H01J 2237/216 Automatic focusing methods
• CPC Class Codes: H01J 2237/2482 Optical means
• CPC Class Codes: H01J 2237/28 Scanning microscopes
• CPC Class Codes: H01J 37/22 Optical , image processing or photographic arrangements associated with the tube

Abstract

The disclosed apparatus comprises a charged particle beam system and method including a particle beam generator for forming a beam of electrons, ions or other charged particles and for directing the beam along a predetermined axis to a focal point. Object support means support an object on the particle beam axis with the focal point on a surface of the object. There is provided an optical beam system forming part of an autofocusing system for maintaining the relative positions of the beam generating means and the object support means along the particle beam axis. The optical beam system comprises means for developing an optical beam, and means for directing the optical beam transversely to the particle beam axis and at an acute angle to the object surface. Means are provided for forming an optical beam first focus on a surface of the object. Optical image forming mirror means collects radiation from the optical beam first focus and forms a beam second focus in the vicinity of the beam first focus such that a change in the height or vertical position of the object surface along the particle beam axis produces a change in the position of the second focus indicative of the object surface height or position change.

Claims

1. Apparatus comprising:

a particle beam system comprising;

particle beam generating means for forming a beam of electrons, ions or other particles, and for directing said beam along a predetermined axis of a focal point; and

object support means for supporting an object on said axis with said focal point on a surface of said object; and

in an autofocusing system for maintaining the relative positions of said beam generating means and said object support means along said particle beam axis, an optical beam system comprising;

means for developing an optical beam;

means for directing said optical beam transversely to said particle beam axis and at an acute angle to said object surface and for forming an optical beam first focus on a surface of said object; and

a spherical mirror with its center of curvature on said object surface at said first focus for collecting radiation from said optical beam first focus and for forming a beam second focus in the vicinity of said beam first focus such that a change in the height or vertical position of said object surface along said axis produces a change in the position of said second focus indicative of said object surface height or position change.

2. The apparatus defined by claim 1 wherein said object support means includes Z-motion stage means for making adjustments in the operating distance between said particle beam generating means and said object surface along said axis, and wherein said means for directing said beam and for forming a first optical beam focus substantially on a surface of said object includes means for adjusting the optical path length of the optical beam to accommodate gross adjustments in said operating distance without substantially altering the angle of incidence of said optical beam on said object surface.

3. The apparatus defined by claim 1 wherein said object support means includes Z-motion stage means for making gross and fine adjustments in the operating distance between said particles beam generating means and said object surface along said axis, and wherein said apparatus includes means for mechanically coupling said spherical mirror to said object support means to move therewith to maintain said second focus on said surface as gross or fine adjustments in the position of said object are made.

4. The apparatus defined by claim 1 wherein said object support means includes Z-motion stage means for making gross and fine adjustments in the operating distance between said particle beam generating means and said object surface along said axis, and wherein said apparatus includes mirror support means for supporting said spherical mirror means independently of said object support means.

5. The apparatus defined by claim 1 wherein said object support means includes Z-motion stage means for making adjustments in the operating distance between said particle beam generating means and said object surface along said axis, wherein said apparatus includes means for supporting said spherical mirror for Z-axis movement in coordination with said operating distance adjustments, and wherein said means for directing said optical beam and for forming a first optical beam focus on a surface of said object includes means for adjusting the optical path length of the optical beam, whereby adjustments of the operating distance are accommodated without significantly altering the geometrical inter-relationship of said optical beam, said spherical mirror, and said object.

6. Apparatus comprising:

a particle beam system comprising;

particle beam generating means for forming a base of electrons, ions or other particles, and for directing said beam along a predetermined axis to a focal point; and

object support means for supporting an object on said axis with said focal point on a surface of said object; and

in an autofocusing system coupled to said object support means for adjusting the position of said object support means along said particle beam axis, an optical beam system comprising;

means for developing an optical beam;

means for directing said beam transversely to said particle beam axis and at an acute angle to said object surface and for forming an optical beam first focus on a surface of said object;

object image forming and reflecting means for collecting radiation from said optical beam first focus and for forming a second focus in the vicinity of said beam first focus such that a change in the height or vertical position of said object surface along said axis produces a change in the position of said second focus indicative of said object surface height or position change; and

said object support means including means for making adjustments in the operating distance between said particle beam generating means and said surface along said axis, and wherein said apparatus includes means for mechanically coupling said image-forming and reflecting means to said object support means to move therewith to maintain said second focus on said surface as any adjustments in the position of said object surface are made.

7. The apparatus defined by claim 6 wherein said image-forming means is a spherical mirror having a center of curvature on said object surface at said first focus.

8. Apparatus comprising:

a particle beam system comprising;

particle beam means for forming a beam of electrons, ions or other particles, and for directing said beam along a predetermined axis to a focal point; and

object support means for supporting an object on said axis with said focal point on a surface of said object; and

in an autofocusing system coupled to said object support means for adjusting the position of said object support means along said particle beam axis, an optical beam system comprising;

means for developing an optical beam;

means for directing said beam transversely to said particle beam axis and at an acute angle to said object surface and for forming a first optical beam focus on a surface of said object;

optical image forming and reflecting means for collecting radiation from said optical beam first focus and for forming a second focus in the vicinity of said beam focus such that a change in the height or vertical position of said object surface along said axis produces a change in the position of said second focus indicative of said object surface height or position change; and

said object support means including means for making adjustments in the operating distance between said particle beam means and said object surface measured along said axis, and wherein means for directing said beam and for forming a first optical beam focus on a surface of said object includes means for adjusting the optical path length of the optical beam to accommodate gross adjustments in said operating distance without substantially altering the angle of incidence of said optical beam on said surface.

9. The apparatus defined by claim 8 wherein said apparatus includes means for mechanically coupling said image-forming and reflecting mirror means to said object support means, and wherein said means for directing said beam and for forming a first optical beam and for forming a first optical beam focus on a surface of said object includes optical telescope means for adjusting the optical path length of the beam, whereby adjustments of the operating distance are accommodated without significantly altering the geometrical inter-relationship of said optical beam, said image-forming mirror means, and said object.

10. The apparatus defined by claim 9 wherein said image-forming and reflecting means is a spherical mirror with its center of curvature substantially on said object surface at said first focus.

11. The apparatus defined by claim 8 wherein said image-forming means is a spherical mirror with a center of curvature on said object surface of said first focus.

12. A system comprising:

a focused particle beam system comprising;

means for forming a beam of electrons, ions or other particles, and for directing said particle beam along a predetermined axis;

object support means for supporting an object on said axis;

lens means on said axis for receiving said particle beam and for forming a focus on a surface of said object; and

a tilt-immune optical inspection system, comprising;

means for developing an optical inspection beam;

means for receiving said optical beam, for directing said optical beam onto said object surface along an axis forming an acute angle with said object surface, and for forming an optical first beam focus on said object surface;

optical image-forming means for collecting radiation from said beam first focus and for forming a second focus in the vicinity of said beam first focus; and

object support means for tilting said object about an axis parallel to said surface and substantially through said beam first focus;

said optical image-forming means being mechanically mounted to move with said object as it is tilted by said tilting means to immunize said system from effects of tilting said object.

13. The apparatus defined by claim 12 wherein said optical image-forming means is a spherical mirror.

14. Apparatus comprising:

a particle beam system comprising;

particle beam generating means for forming a beam of electrons, ions or other particles, and for directing said beam along a predetermined axis to a focal point; and

object support means for supporting an object on said axis with said focal point on a surface of said object; and

in an autofocusing system for maintaining the relative positions of said beam generating means and said object support means along said particle beam axis, an optical beam system comprising;

means for developing an optical beam;

means for directing said optical beam transversely to said particle beam axis and at an acute angle to said object surface and for forming an optical beam first focus on a surface of said object; and

optical image forming and reflecting means for collecting radiation from said optical beam first focus and for reflectively forming a beam second focus in the vicinity of said beam first focus such that a change in the height or vertical position of said object surface along said axis produces a change in the position of said second focus indicative of said object surface height or position change, said object support means including Z-motion stage means for making gross or fine adjustments in the operating distance between said particle beam generating means and said object surface along said axis, said apparatus including second support means for supporting said image-forming and reflecting means independently of said object support means, and adapted to move said image-forming and reflecting means in coordination with adjustments of said operating distance so as to maintain said second focus on said surface as gross or fine adjustments in the position of said object are made.

15. The apparatus defined by claim 14 wherein said image-forming and reflecting means is a spherical mirror with its center of curvature on said object surface substantially at said first focus.

16. Apparatus comprising:

a particle beam system comprising;

particle beam generating means for forming a beam of electrons, ions or other particles, and for directing said beam along a predetermined axis to a focal point; and

object support means for supporting an object on said axis with said focal point on a surface of said object; and

in an autofocusing system for maintaining the relative positions of said beam generating means and said object support means along said particle beam axis, an optical beam system comprising;

means for developing an optical beam;

means for directing said optical beam transversely to said particle beam axis and at an acute angle to said object surface and for forming an optical beam first focus on a surface of said object; and

optical image-forming and reflecting means for collecting radiation from said optical beam first focus and for reflectively forming a beam second focus in the vicinity of said beam first focus such that a change in the height or vertical position of said object surface along said axis produces a change in the position of said second focus indicative of said object surface height or position change, said object support means including cradle means adapted to tilt about a tilt axis passing substantially along said object surface and through said particle beam focal point, and wherein said image-forming and reflecting means is mechanically coupled to said object support means to tilt therewith.

17. The apparatus defined by claim 16 wherein said image-forming and reflecting means is a spherical mirror with its center of curvature substantially on said object surface at said first focus.

18. The apparatus defined by claim 17 wherein said spherical mirror is angularly asymmetric with respect to a plane defined by incident and reflected optical beams and favors the direction of tilt of said mirror.

19. The apparatus defined by claim 18 wherein said mirror comprises a sector of approximately 90 degrees with about 75 degrees on the favored side of said plane.

20. The apparatus defined by claim 16 wherein said object support means further includes means for making gross and fine adjustments in the operating distance between said particle beam means and said object surface along said axis, and wherein said apparatus includes means for mounting said image-forming and reflecting means on said cradle means such that when adjustments are made in said operating distance, said image forming and reflecting means moves with said cradle means to maintain said second focus on said surface.

21. The apparatus defined by claim 20 wherein said image-forming and reflecting means is a spherical mirror with its center of curvature substantially on said object surface at said first focus.

22. The apparatus defined by claim 21 wherein said spherical mirror is angularly asymmetric with respect to a plane defined by incident and reflected optical beams and favors the direction of tilt of said mirror.

23. The apparatus defined by claim 22 wherein said mirror comprises a sector of approximately 90 degrees with about 75 degrees on the favored side of said plane.

24. The apparatus defined by claim 20 wherein said means for directing said beam and for forming a first optical beam focus on said surface of said object includes means for adjusting the optical path length of the beam to accommodate adjustments in said operating distance without substantially altering the angle of incidence of said optical beam on said surface.

25. An optical beam surface inspection system comprising:

means for developing an optical beam;

means for directing said optical beam at an acute angle to a surface of an object and for forming a first optical beam focus on said surface of said object; and

optical image-forming mirror means for collecting radiation from said optical beam first focus and for forming a beam second focus in the vicinity of said beam first focus such that a change in the height or vertical position of said object surface along said axis produces a change in the position of said second focus indicative of said object surface height or position change, said system including cradle means supporting said object and adapted to tilt about a tilt axis passing substantially along said object surface, said image-forming mirror means being mechanically coupled to said cradle to tilt therewith.

26. The apparatus defined by claim 25 wherein said image-forming mirror means is a spherical mirror with its center of curvature on said object surface substantially at said first focus.

27. The apparatus defined by claim 26 wherein said mirror comprises a sector of approximately 90 degrees with about 75 degrees on the favored side of said plane.