High-efficiency, multilevel, diffractive optical elements
First Claim
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1. Method for making high-efficiency, multilevel, diffractive optical elements comprising:
- generating at least one binary amplitude mask including multilevel information, the mask being configured to provide 2N levels where N is the number of masks; and
utilizing the masks'"'"' information for constructing 2N levels in the optical element, the depths of the levels being related by a fixed ratio.
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Abstract
The method utilizes high resolution lithography, mask aligning, and reactive ion etching. In particular, at least two binary amplitude masks are generated. A photoresist layer on an optical element substrate is exposed through the first mask and then etched. The process is then repeated for the second and subsequent masks to create a multistep configuration. The resulting optical element is highly efficient.
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Citations
11 Claims
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1. Method for making high-efficiency, multilevel, diffractive optical elements comprising:
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generating at least one binary amplitude mask including multilevel information, the mask being configured to provide 2N levels where N is the number of masks; and utilizing the masks'"'"' information for constructing 2N levels in the optical element, the depths of the levels being related by a fixed ratio. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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5. The method of claim 1 wherein the masks are made by electron beam pattern generators.
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6. The method of claim 1 wherein the optical element is a lens.
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7. The method of claim 1 wherein the optical element corrects for spherical aberration.
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8. The method of claim 1 wherein the optical element is corrected for chromatic aberration.
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9. Method for making high-efficiency multilevel diffractive optical elements comprising:
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making a master optical element according to the method of claim 1; and using the master optical element to emboss multiple replicated optical components.
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10. The method of claim 9 wherein the master optical element is copied in metal which is used for the embossing.
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11. Method for making a high efficiency, multi-level, diffractive optical element comprising:
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providing a substrate including at least two initial levels; generating at least one binary amplitude mask including multi-level information; and utilizing the mask to double the number of levels in the element.
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Specification