Vibration sensor including a reduced capacity lower portion for maintaining airtightness and enhancing reliability

• US 5,218,870 A
• Filed: 04/24/1991
• Issued: 06/15/1993
• Est. Priority Date: 04/27/1990
• Status: Expired due to Term

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Komurasaki, Satoshi, Uemura, Fumito
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): Finley, Rose M.
• Application Number:
  US07/690,249
• Time in Patent Office: 783 Days
• Field of Search: 73/35, 73/654, 310/329
• US Class Current: 73/654
• CPC Class Codes: G01H 11/08 using piezoelectric devices
• CPC Class Codes: G01L 23/222 using piezoelectric devices
• CPC Class Codes: G01P 1/023 for acceleration measuring devices

Abstract

A vibration sensor is provided in which the depth of a caulked portion of the sensor'"'"'s case is increased so as to increase the capacity of a recess defined between this caulked portion and the cover. The volume of a potting agent filling the recess can thereby be increased to improve the airtightness of the caulked portion and the reliability of the vibration detector. A vibration plate having cutouts circumferentially spaced along an outer, peripheral portion may be used in the vibration detector if the volume of the space formed on a lower side of the vibration plate is limited to about a few to ten percent of that of the space formed on the opposite, terminal side. The expansion of air in the spaces caused by a thermal shock is therefore substantially equal to the expansion of air contained in the space on the terminal side alone, so that vibration sensor can maintain sufficient airtightness and can be improved in reliability.

Claims

1. A vibration sensor comprising:

a piezoelectric element;

a vibration plate, one side of which secures and supports said piezoelectric element, said vibration plate having cutouts circumferentially spaced along an outer, peripheral portion;

a metallic case for holding said vibration plate so that a first space is formed on a side of said vibration plate remote from said one side to which said piezoelectric element is secured and supported; and

a resin cover for covering said piezoelectric element to form a second space opposite said first space and surrounding said piezoelectric element, a joint portion of said resin cover and said case pinching and fixing said vibration plate in place;

wherein the volume of said first space ranges from about a few to ten percent of the volume of said second space.