Interferometer for in situ measurement of thin film thickness changes

• US 5,220,405 A
• Filed: 12/20/1991
• Issued: 06/15/1993
• Est. Priority Date: 12/20/1991
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Barbee, Steven G., Li, Leping, Silvestri, Victor J.
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): KEESEE, LACHARLES
• Application Number:
  US07/811,506
• Time in Patent Office: 543 Days
• Field of Search: 356/357, 356/359, 356/358, 356/360, 356/445, 356/446, 356/447, 356/381, 356/135-137, 156/626
• US Class Current: 356/503
• CPC Class Codes: G01B 11/0675 using interferometry

Abstract

An interferometer 10 for measuring the position of the process surface 21 of a substrate 20 includes a coherent light source 12 for providing a light beam 14 which is partially transmitted and partially reflected by a beam splitter 16. The reflected light beam 18 is reflected off of the process surface 21 and the transmitted light beam 30 is reflected off of a translator 32 which vibrates a predetermined distance at a predetermined frequency. The phase shift between the light beams 22, 31 reflected off of translator 32 and the process surface 21 is measured using a photodetector 24, which provides an output signal 26 to a feedback servo unit 28. The servo unit 28 provides an output signal 38 which controls the vibration of translator 32. The output signal 38 of servo unit 28 is also indicative of the position of the process surface 21.

Claims

1. An apparatus comprising:

first light source means for providing a first light beam of coherent light;

first beam splitter means for partially transmitting and partially reflecting said first light beam, thereby providing a second light beam and a third light beam, respectively;

second beam splitter means for partially reflecting and partially transmitting said second light beam, thereby providing a fourth light beam and a fifth light beam, respectively;

first translating means having a first translating surface which translates a predetermined distance for reflecting said fifth light beam to thereby provide a sixth light beam;

a substrate having;

a processing surface, the position of which is to be measured; and

a back surface, wherein said processing surface reflects said fourth light beam to thereby provide a seventh light beam;

first measurement means responsive to said sixth and seventh light beams for measuring the phase shift therebetween, wherein the phase shift is a function of the difference in position of the processing surface and the first translating surface and wherein said first measurement means provides a first measurement signal indicative of the relative position of the processing surface;

third beam splitter means for partially reflecting and partially transmitting said third light beam, thereby providing an eighth light beam and a ninth light beam, respectively;

second translating means having a second translating surface which translates a predetermined distance for reflecting said ninth light beam to thereby provide a tenth light beam,

wherein the back surface reflects said eighth light beam to thereby provide an eleventh light beam;

second measurement means responsive to said tenth and eleventh light beams for measuring the phase shift therebetween, wherein the phase shift is a function of the difference in position of the back surface and the second translating surface and wherein said second measurement means provides a second measurement signal indicative of the relative position of the back surface; and

,

comparator means comparing the first and second measurement signals to thereby provide a position output signal.

2. An apparatus according to claim 1, further comprising:

first and second control means responsive to the first and second measurement signals, respectively, for providing first and second feedback control signals, respectively.

3. An apparatus according to claim 2, wherein said first and second control means are each comprised of:

comparator means for comparing the respective measurement signal to a reference signal for providing a difference signal; and

,

signal conditioning means responsive to the difference signal for conditioning the difference signal and providing the feedback control signal as a function of the difference signal.

4. An apparatus according to claim 1, wherein said first and second translating means are comprised of a reflective substrate attached to a piezoelectric crystal.

5. An apparatus according to claim 1, wherein said second and third beam splitters partially transmit on the order of half of said second and third light beams, respectively.

6. An apparatus according to claim 1, wherein said first and second measurement means are comprised of a photodetector.

7. An apparatus according to claim 1, further comprising scanning means for translating said second beam splitter means, said first translating means and said first measurement means in the same plane as said first light beam for measuring the topography or the processing surface.

8. A semiconductor processing apparatus comprising:

processing chamber means for providing conditions required to process a substrate, said substrate having a processing surface and a back surface, the processing surface having a position of which is to be measured;

light source means for providing a first light beam of coherent light;

first beam splitter means for partially transmitting and partially reflecting said first light beam, thereby providing a second light beam and a third light beam, respectively;

second beam splitter means for partially reflecting and partially transmitting said second light beam, thereby providing a fourth light beam and a fifth light beam, respectively;

first translating means having a first translating surface which translates a predetermined distance for reflecting said fifth light beam to thereby provide a sixth light beam,

wherein the processing surface reflects said fourth light beam to thereby provide a seventh light beam;

first measurement means responsive to said sixth and seventh light beams for measuring the phase shift therebetween, wherein the phase shift is a function of the difference in position of the processing surface and the first translating surface and wherein said first measurement means provides a first measurement signal indicative of the relative position of the processing surface;

third beam splitter means for partially reflecting and partially transmitting said third light beam, thereby providing an eighth light beam and a ninth light beam, respectively;

second translating means having a second translating surface which translates a predetermined distance for reflecting said ninth light beam to thereby provide a tenth light beam,

wherein the back surface reflects said eighth light beam to thereby provide an eleventh light beam;

second measurement means responsive to said tenth and eleventh light beams for measuring the phase shift therebetween, wherein the phase shift is a function of the difference in position of the back surface and the second translating surface and wherein said second measurement means provides a second measurement signal indicative of the relative position of the back surface; and

,

comparator means for comparing the first and second measurement signals to thereby provide a position output signal.

9. An apparatus according to claim 8, wherein said first and second translating means are comprised of a reflective substrate attached to a piezoelectric crystal.

10. An apparatus according to claim 8, wherein said second and third beam splitters partially transmit on the order of half of said second and third light beams, respectively.

11. An apparatus according to claim 8, wherein said first and second measurement means are comprised of a photodetector.

12. A method for measuring the position of a substrate processing surface, the substrate further having a back surface, said method comprising the steps of:

providing a first light beam of coherent light;

providing a first beam splitter for partially transmitting said first light beam, thereby providing a second light beam, and partially reflecting said first light beam, thereby providing a third light beam;

providing a second beam splitter for partially reflecting said second light beam, thereby providing a fourth light beam, and partially transmitting said third light beam, thereby providing a fifth light beam;

providing a first translating means having a first translating surface which translates a first predetermined distance for reflecting said fifth light beam to thereby provide a sixth light beam;

reflecting said fourth light beam off of the processing surface to thereby provide a seventh light beam;

measuring the phase shift between said sixth and seventh light beams, wherein the phase shift is a function of the relative position of the processing surface;

providing a first measurement signal indicative of the phase shift between the sixth and seventh light beams;

controlling said first predetermined distance in response to said first measurement signal;

providing a third beam splitter for partially reflecting said third light beam, thereby providing an eighth light beam, and partially transmitting said third light beam, thereby providing a ninth light beam;

providing a second translating means having second a translating surface which translates a second predetermined distance for reflecting said ninth light beam to thereby provide a tenth light beam;

reflecting said eighth light beam off of the back surface to thereby provide an eleventh light beam;

measuring the phase shift between said tenth and eleventh light beams, wherein the phase shift is a function of the relative position of the back surface;

providing a second measurement signal indicative of the phase shift between the tenth and eleventh light beams;

controlling said second predetermined distance in response to said second measurement signal; and

,

comparing said first and second measurement signals to thereby provide a net output signal.

13. A method for measuring the position of a substrate surface according to claim 12, wherein said first and second translating means are comprised of a reflective substrate attached to a piezoelectric crystal.

14. A method for measuring the position of a substrate surface according to claim 12, wherein said second and third beam splitters transmit on the order of half of said second and third light beams, respectively.

15. A method for measuring the position of a substrate surface according to claim 12, wherein the ratio of transmitted to reflected light of said first beam splitter is variable.

16. A method for measuring the position of a substrate surface according to claim 12, wherein a photodetector is utilized for said measuring steps.

17. A method for measuring the position of a substrate surface according to claim 16, further comprising the step of translating said second beam splitter, said first translating means and said first photodetector in the same plane as said first light beam for measuring the topography of the processing surface.

18. An apparatus for measuring a position of a processing surface on a substrate, the substrate further having a back surface, said apparatus comprising:

first light source means for providing a first light beam of coherent light;

first beam splitter means for partially transmitting and partially reflecting said first light beam, thereby providing a second light beam and a third light beam, respectively;

second beam splitter means for partially reflecting and partially transmitting said second light beam, thereby providing a fourth light beam and a fifth light beam, respectively;

first translating means having a first translating surface which translates a predetermined distance for reflecting said fifth light beam to thereby provide a sixth light beam, and wherein the processing surface reflects said fourth light beam to thereby provide a seventh light beam;

first measurement means responsive to said sixth and seventh light beams for measuring the phase shift therebetween, wherein the phase shift is a function of the difference in position of the processing surface and the first translating surface and wherein said first measurement means provides a first measurement signal indicative of the relative position of the processing surface;

third beam splitter means for partially reflecting and partially transmitting said third light beam, thereby providing an eighth light beam and a ninth light beam, respectively;

second translating means having a second translating surface which translates a predetermined distance for reflecting said ninth light beam to thereby provide a tenth light beam, and wherein the back surface reflects said eighth light beam to thereby provide an eleventh light beam;

second measurement means responsive to said tenth and eleventh light beams for measuring the phase shift therebetween, wherein the phase shift is a function of the difference in position of the back surface and the second translating surface and wherein said second measurement means provides a second measurement signal indicative of the relative position of the back surface; and

,

comparator means for comparing the first and second measurement signals to thereby provide a position output signal.

19. The apparatus according to claim 18, further comprising:

first control means responsive to said first measurement signal for providing a first feedback control signal to said first translating means; and

second control means responsive to the second measurement signal for providing a second feedback control signal to said second translating means.

20. The apparatus according to claim 19, wherein

said first control means comprises a first comparator means for comparing the first measurement signal to a first reference signal for providing a first difference signal, said first control means further comprises a first signal conditioning means, responsive to the first difference signal, for conditioning the first difference signal and providing the first control signal as a function of the first difference signal, and

said second control means comprises a second comparator means for comparing the second measurement signal to a second reference signal for providing a second difference signal, said second control means further comprises a second signal conditioning means, responsive to the second difference signal, for conditioning the second difference signal and providing the second control signal as a function of the second difference signal.

21. The apparatus according to claim 18, wherein said first and second translating means are comprised of a reflective substrate attached to a piezoelectric crystal, respectively.

22. The apparatus according to claim 18, wherein said second and third beam splitters partially transmit on the order of half of said second and third light beams, respectively.

23. The apparatus according to claim 18, wherein said first and second measurement means are comprised of a photodetector, respectively.

24. The apparatus according to claim 18, further comprising scanning means for translating said second beam splitter means, said first translating means and said first measurement means in the same plane as said first light beam for measuring the topography of the processing surface.