Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof

• US 5,220,555 A
• Filed: 10/29/1991
• Issued: 06/15/1993
• Est. Priority Date: 09/30/1988
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Yanagisawa, Yoshihiro, Sakai, Kunihiro, Kawade, Hisaaki
• Primary Examiner(s): Anderson, Bruce C.
• Application Number:
  US07/783,790
• Time in Patent Office: 595 Days
• Field of Search: 250/306, 250/307, 369/101, 369/126
• US Class Current: 369/126
• CPC Class Codes: G01Q 60/16 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01Q 70/04 with compensation for temperature or vibration induced errors
• CPC Class Codes: G01Q 70/06 Probe tip arrays
• CPC Class Codes: G11B 9/1445 switching at least one head in operating function; Controlling the relative spacing to keep the head operative, e.g. for allowing a tunnel current flow
• CPC Class Codes: Y10S 977/837 Piezoelectric property of nanomaterial
• CPC Class Codes: Y10S 977/861 Scanning tunneling probe
• CPC Class Codes: Y10S 977/881 Microscopy or spectroscopy, e.g. sem, tem
• CPC Class Codes: Y10S 977/947 with scanning probe instrument

Abstract

A scanning tunnel-current-detecting device comprising at least two probe electrodes supported by a supporting member, a means for placing a sample in proximity to the probe electrodes, a means for applying voltage between the probe electrodes and the sample, at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member and the sample, is provided.

Claims

1. A method for recording an information into a recording medium by means of a probe electrode in proximity to the recording medium, comprising using a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and recording an information into said recording medium by means of said first probe electrode, while compensating deviation of a distance between said first probe electrode and said recording medium by adjusting a distance between said recording medium and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said recording medium.

2. The method for recording an information according to claim 1, wherein said first probe electrode is connected with said supporting member through driving means for driving said first probe electrode.

3. The method for recording an information according to claim 2, wherein said driving means is a piezo element.

4. The method for recording an information according to claim 1, wherein said second probe electrode is kept at a specified position above said recording medium.

5. The method for recording an information according to claim 1, wherein said recording medium has a recording layer on the surface.

6. The method for recording an information according to claim 1, wherein said recording is carried out by applying a pulse voltage exceeding a threshold voltage for changing an electric resistance of said recording medium, from said first probe electrode to said recording medium.

7. A method for reproducing a recorded information by means of a probe electrode in proximity to a recording medium comprising using a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and reproducing said information from said recording medium by means of said first probe electrode, while compensating deviation of a distance between said first probe electrode and said recording medium by adjusting a distance between said recording medium and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said recording medium.

8. The method for reproducing an information according to claim 7, wherein said first probe electrode is connected with said supporting member through driving means for driving said first probe electrode.

9. The method for reproducing an information according to claim 8, wherein said driving means is a piezo element.

10. The method for reproducing an information according to claim 7, wherein said second probe electrode is kept at a specified position above said recording medium.

11. The method for reproducing an information according to claim 7, wherein said recording medium has a recording layer on the surface.

12. The method for reproducing an information according to claim 7, wherein said reproducing is carried out by detecting a current flowing between said first probe electrode and said recording medium.

13. A method for erasing a recorded information by means of a probe electrode in proximity to a recording medium comprising using a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and erasing said recorded information by means of said first probe electrode, while compensating deviation of a distance between said first probe electrode and said recording medium by adjusting a distance between said recording medium and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said recording medium.

14. The method for erasing a recorded information according to claim 13, wherein said first probe electrode is connected with said supporting member through driving means for driving said first probe electrode.

15. The method for erasing a recorded information according to claim 14, wherein said driving means is a piezo element.

16. The method for erasing a recorded information according to claim 13, wherein said second probe electrode is kept at a specified position above said recording medium.

17. The method for erasing a recorded information according to claim 13, wherein said recording medium has a recording layer on the surface.

18. The method for erasing a recorded information according to claim 13, wherein said erasing of a recorded information is carried out by applying a pulse voltage exceeding a threshold voltage for changing an electric resistance of said recording medium, from said first probe electrode to said recording medium.

19. A method for recording an information into a recording medium by means of a probe electrode in proximity to a recording medium, comprising using at least four probe electrodes, which can be driven independently, supported by a supporting member, and recording an information into said recording medium by means of the fourth probe electrode, while adjusting a distance between a surface of said recording medium and said supporting member so as to keep nearly constant each current flowing between said first to third probe electrodes and said recording medium, respectively.

20. The method for recording an information according to claim 19, wherein said recording medium surface and said supporting member are kept horizontal, by adjusting a distance between said recording medium surface and said supporting member.

21. The method for recording an information according to claim 19, wherein said fourth probe electrode is connected with said supporting member through a driving means for driving said fourth probe electrode.

22. The method for recording an information according to claim 21, wherein said driving means is a piezo element.

23. The method for recording an information according to claim 19, wherein said first to third probe electrodes are kept at specified positions above said recording medium.

24. The method for recording an information according to claim 19, wherein said recording medium has a recording layer on the surface.

25. The method for recording an information according to claim 19, wherein said recording of an information is carried out by applying a pulse voltage exceeding a threshold voltage for changing an electric resistance of said recording medium, from said fourth probe electrode to said recording medium.

26. A method for reproducing a recorded information by means of a probe electrode in proximity to a recording medium, comprising using at least four probe electrodes, which can be driven independently, supported by a supporting member, and reproducing said information in said recording medium by means of the fourth probe electrode, while adjusting a distance between a surface of said recording medium and said supporting member so as to keep substantially constant each current flowing between said first to third probe electrodes and said recording medium, respectively.

27. The method for reproducing an information according to claim 26, wherein said recording medium and said supporting member are kept horizontal, by adjusting a distance between said recording medium and said supporting member.

28. The method for reproducing an information according to claim 26, wherein said fourth probe electrode is connected with said supporting member through a driving means for driving said fourth probe electrode.

29. The method for reproducing an information according to claim 28, wherein said driving means is a piezo element.

30. The method for reproducing an information according to claim 26, wherein said first to third probe electrodes are kept at specified positions above said recording medium.

31. The method for reproducing an information according to claim 26, wherein said recording medium has a recording layer on the surface.

32. The method for reproducing an information according to claim 26, wherein said reproducing an information is carried out by detecting a current flowing between said fourth probe electrode and said recording medium.

33. A method for erasing a recorded information by means of a probe electrode in proximity to a recording medium, comprising using at least four probe electrodes, which can be driven independently, supported by a supporting member, and erasing said information in said recording medium by means of the fourth probe electrode, while adjusting a distance between a surface of said recording medium and said supporting member so as to keep substantially constant each current flowing between said first to third probe electrodes and said recording medium, respectively.

34. The method for erasing an information according to claim 33, wherein said recording medium and said supporting member are kept horizontal, by adjusting a distance between said recording medium and said supporting member.

35. The method for erasing an information according to claim 33, wherein said fourth probe electrode is connected with said supporting member through a driving means for driving said fourth probe electrode.

36. The method for erasing an information according to claim 35, wherein said driving means is a piezo element.

37. The method for erasing an information according to claim 33, wherein said first to third probe electrodes are kept at specified positions above said recording medium.

38. The method for erasing an information according to claim 33, wherein said recording medium has a recording layer on the surface.

39. The method for erasing an information according to claim 33, wherein said erasing of an information is carried out by applying a pulse voltage exceeding a threshold voltage for changing an electric resistance of said recording medium, from said fourth electrode to said recording medium.

40. An information detecting device for detecting an information by means of a probe electrode in proximity to a sample surface, comprising at least four probe electrodes, which can be driven independently, supported by a supporting member, and provided with a means for adjusting a distance between said sample surface and said supporting member so as to keep substantially constant each current flowing between said first to third probe electrodes and said sample surface, respectively, and keeping said sample surface and said supporting member horizontal, and a driving means for driving said fourth probe electrode.

41. A recording/reproducing device for recording an information into a recording medium and/or for reproducing or erasing a recorded information by means of a probe electrode in proximity to a recording medium, comprising at least four probe electrodes, which can be driven independently, supported by a supporting member, and provided with a means for adjusting a distance between said recording medium and said supporting member so as to keep substantially constant each current flowing between said first to third probe electrodes and said recording medium, respectively, and keeping said recording medium and a supporting member horizontal, and a driving means for driving said fourth probe electrode.

42. The recording/reproducing device according to claim 41, wherein said fourth probe electrode is connected with said supporting member through said driving means for driving said fourth probe electrode.

43. The recording/reproducing device according to claim 41, wherein said driving means is a piezo element.

44. The recording/reproducing device according to claim 41, wherein said first to third probe electrodes are kept at specified positions above said recording medium.