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Torsion beam accelerometer

  • US 5,220,835 A
  • Filed: 09/12/1991
  • Issued: 06/22/1993
  • Est. Priority Date: 09/12/1991
  • Status: Expired due to Term
First Claim
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1. An accelerometer comprising:

  • a substrate;

    a sensing element having at least a first internal opening;

    mounting means positioned within said first internal opening for mounting the sensing element on the substrate so that the sensing element is portioned above the substrate and can rotate about a flexure axis that is above and substantially parallel tot he substrate, the mounting means including a pedestal mounting to the substrate and a spring means for providing an elastic coupling connected to a the pedestal, and a pair of torsion members extending in opposite directions from the spring means to the sensing element;

    means for sensing rotation of the sensing element about the flexure axis;

    said spring means including a pair of members connecting said torsion members to said pedestal around a second and third internal opening to the spring means.

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