Torsion beam accelerometer
First Claim
Patent Images
1. An accelerometer comprising:
- a substrate;
a sensing element having at least a first internal opening;
mounting means positioned within said first internal opening for mounting the sensing element on the substrate so that the sensing element is portioned above the substrate and can rotate about a flexure axis that is above and substantially parallel tot he substrate, the mounting means including a pedestal mounting to the substrate and a spring means for providing an elastic coupling connected to a the pedestal, and a pair of torsion members extending in opposite directions from the spring means to the sensing element;
means for sensing rotation of the sensing element about the flexure axis;
said spring means including a pair of members connecting said torsion members to said pedestal around a second and third internal opening to the spring means.
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Abstract
A semiconductor accelerometer having a sensor element supported by a pedestal coupled to a substrate. Coupling between the pedestal and the sensor element includes opposing torsion beams along the axis of flexure coupled through a spring to the pedestal. The spring includes a pair of beams extending in a direction perpendicular to the torsion beams so that thermal expansion applies a tensile force to the torsion beams.
40 Citations
5 Claims
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1. An accelerometer comprising:
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a substrate; a sensing element having at least a first internal opening; mounting means positioned within said first internal opening for mounting the sensing element on the substrate so that the sensing element is portioned above the substrate and can rotate about a flexure axis that is above and substantially parallel tot he substrate, the mounting means including a pedestal mounting to the substrate and a spring means for providing an elastic coupling connected to a the pedestal, and a pair of torsion members extending in opposite directions from the spring means to the sensing element; means for sensing rotation of the sensing element about the flexure axis; said spring means including a pair of members connecting said torsion members to said pedestal around a second and third internal opening to the spring means. - View Dependent Claims (2, 3, 4, 5)
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Specification