X-ray analysis apparatus, especially computer tomography apparatus and X-ray target and collimator therefor

• US 5,222,114 A
• Filed: 05/28/1991
• Issued: 06/22/1993
• Est. Priority Date: 05/30/1990
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Kamata, Shoji, Izumi, Shigeru
• Primary Examiner(s): Porta, David P.
• Application Number:
  US07/706,586
• Time in Patent Office: 756 Days
• Field of Search: 378/4, 378/10, 378/20, 378/119, 378/124, 378/125, 378/126, 378/127, 378/130, 378/143, 378/144
• US Class Current: 378/143
• CPC Class Codes: G01N 2223/419 computed tomograph
• CPC Class Codes: G01N 23/046 using tomography, e.g. computed tomography [CT]
• CPC Class Codes: G21K 1/025 using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
• CPC Class Codes: H01J 35/116 Transmissive anodes acting as a window H01J35/186

Abstract

An X-ray analysis apparatus has a charged particle beam generator, an X-ray generating target bombarded by the beam and a detector for X-rays from said target transmitted by a test piece. To improve the spatial resolution of the apparatus, the beam size is reduced at the target by locating the target outside a vacuum chamber of the beam generator by providing the target as a non-circular narrow track of X-ray generating material exposed at both surfaces of the target, and by providing the beam generator with a beam accelerator and means for reducing the beam diameter between the beam accelerator and the target.

Claims

1. An X-ray analysis apparatus comprising

(a) a charged particle beam generator having a vacuum chamber and means in said vacuum chamber for generating a charged particle beam,

(b) an X-ray generating target located outside said vacuum chamber, said target having a first surface which is bombarded by said charged particle beam and a second surface which is opposite said first surface, said target comprising at least one portion of target material exposed at both said first surface and said second surface and which emits X-rays when said first surface is bombarded by said charged particle beam, said at least one portion having a narrow width relative to a width of said target and being arranged in said target as a non-circular track, and

(c) a detector for X-rays emitted by said target and transmitted through a test piece located between said target and said detector.

2. An X-ray analysis apparatus according to claim 1 wherein said charged particle beam generator is an electron beam generator.

3. An X-ray analysis apparatus according to claim 2 wherein said electron beam generator is capable of generating an electron beam having an average energy of at least 1 MeV.

4. An X-ray analysis apparatus according to claim 1 wherein said detector produces signals in accordance with the transmitted X-rays detected, and the apparatus further comprises

(d) a collimator for said transmitted X-rays located in front of said detector,

(e) scanning means for rotating a said test piece relatively to said target and said detector, and

(f) data processing means for processing data in signals from said detector in accordance with the principle of computer tomography.

5. An X-ray analysis apparatus according to claim 1 wherein said detector is an X-ray sensitive film.

6. An X-ray analysis apparatus according to claim 1 wherein said vacuum chamber has a vacuum-retaining window through which said charged particle beam exits from said chamber.

7. An X-ray analysis apparatus according to claim 1 further comprising means for cooling said target.

8. An X-ray analysis apparatus according to claim 7 wherein said cooling means is adapted to effect cooling of said target by air.

9. An X-ray analysis apparatus according to claim 7 wherein said cooling means is adapted to effect cooling of said target by means of liquid.

10. An X-ray analysis apparatus according to claim 1 further comprising means for displacing said target relative to the said vacuum chamber, thereby to present to said charged particle beam a fresh portion of said target not previously bombarded by said charged particle beam.

11. An X-ray analysis apparatus according to claim 10 wherein said target is displaceable relative to said charged particle beam so that analysis operations can continue even when the charged particle beam causes perforation of said target.

12. An X-ray analysis apparatus according to claim 1 wherein said charged particle beam generator is adapted to generate an electron beam having an average energy of at least 1 MeV and wherein an X-ray generating region of said target has a maximum width of 0.2 mm.

13. An X-ray analysis apparatus according to claim 1 wherein said target has an X-ray generating target material having a width less than the diameter of the charged particle beam which bombards the target.

14. A target for X-ray generating apparatus adapted to be bombarded by an energy beam and having a first side at which said energy beam is incoming and opposite said first side a second side at which X-rays are emitted when said first side is bombarded by said incoming energy beam, said target including at least one wire supported in the target and at least partly consisting of X-ray generating material and being exposed at both said first side and said second side of said target.

15. A target according to claim 14 wherein said wire has two opposite ends supported in the target and, intermediate said opposite ends thereof, said wire carries a body of said X-ray generating material.

16. An X-ray analysis apparatus comprising

(a) a charged particle beam generator for generating a charged particle beam,

(b) an X-ray generating target having a first surface which is bombarded by said charged particle beam and a second surface opposite said first surface, said target comprising at least one portion of target material exposed at both said first surface and said second surface and adopted to emit X-rays at said second surface when said portion exposed at said first surface is bombarded by said beam, said portion as seen looking onto said first surface, having a narrow width relative to the width of sad target and being arranged in said target as a non-circular track, and

(c) a detector for X-rays emitted by said target from said second surface thereof and transmitted through a test piece located between said target and said detector.

17. An X-ray analysis apparatus according to claim 16 wherein said target comprises a matrix material in which said track is embedded and said track has a shape selected from spiral and continuous rectangular, as seen looking onto said first surface.

18. An X-ray analysis apparatus according to claim 16 wherein said target material is provided by a plurality of wires supported in said target.

19. An X-ray analysis apparatus according to claim 16 having means for displacing said target relative to said charged particle beam, thereby to expose a fresh portion of said track to said beam.

20. An X-ray analysis apparatus according to claim 16 wherein said detector produces signals in accordance with the transmitted X-rays detected and the apparatus further comprises

(d) a collimator for said transmitted X-rays located in front of said detector,

(e) scanning means for rotating a

said test piece relatively to said target and said detector, and

(f) data processing means for processing data

in said signals from said detector in accordance with the principle of computer tomography.

21. An X-ray analysis apparatus according to claim 16 wherein said detector is an X-ray-sensitive film.

22. A target for X-ray generating apparatus adapted to bombarded by an energy beam and having a first side at which said energy beam is incoming and opposite said first side a second side at which X-rays are emitted, said target having an element made of X-ray generating material exposed at both said first side and said second side of the target, said element having a narrow elongate shape and being arranged in said target as a non-circular track.

23. A target according to claim 22 wherein said element has a shape selected from spiral shape and continuous rectangular shape, as seen looking onto said first surface.

24. A target according to claim 22 wherein said element has a width of less than 1 mm in the direction transverse to its direction of elongation.