Heat process device
First Claim
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1. A heat process device comprising:
- plural heat process units piled one upon the others at a certain interval, each of said heat process units including a heat transfer plate on one side of which an object to be processed is mounted;
a film-like heating body attached to the other side of the heat transfer plate;
electrodes attached to the film-like heating body; and
a system for supplying a predetermined amount of current to the electrodes.
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Abstract
A heat process device according to the present invention includes a film-like heating body serving as a heat source for a heat transfer plate on which an object to be processed is mounted and heated. Therefore, the heat process device can be excellent in controlling the heating temperature. It can also apply a uniform heat process to the object. Further, it can be made small in size and easy to operate.
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Citations
5 Claims
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1. A heat process device comprising:
plural heat process units piled one upon the others at a certain interval, each of said heat process units including a heat transfer plate on one side of which an object to be processed is mounted;
a film-like heating body attached to the other side of the heat transfer plate;
electrodes attached to the film-like heating body; and
a system for supplying a predetermined amount of current to the electrodes.- View Dependent Claims (2)
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3. A heat process device comprising:
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a heat transfer plate on one side of which an object to be processed is mounted, a film-like heating body formed on this one side of said heat transfer plate, electrodes formed on and along both side edges of said film-like heating body, a means for supplying a predetermined amount of current to said electrodes, and an insulation layer formed not on said electrodes but on said film-like heating body. - View Dependent Claims (5)
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4. A heat process device comprising plural heat process units piled one upon the other at a certain interval, said heat process unit including a heat transfer plate on one side of which an object to be processed is mounted, a film-like heating body formed on this side of said heat transfer plate, electrodes formed on and along both side rims of said film-like heating body, a means for supplying a predetermined amount of current to said electrodes, and an insulation layer formed not on said electrodes but on said film-like heating body.
Specification