Capacitive tactile sensor array and method for sensing pressure with the array

• US 5,225,959 A
• Filed: 10/15/1991
• Issued: 07/06/1993
• Est. Priority Date: 10/15/1991
• Status: Expired due to Fees

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Stearns, Richard G.
• Primary Examiner(s): Griffin, Donald
• Application Number:
  US07/779,757
• Time in Patent Office: 630 Days
• Field of Search: 361/290, 361/283, 200/DIG. 1, 340/324 M, 340/365 C, 340/712, 73/718, 73/724
• US Class Current: 361/283.1
• CPC Class Codes: G01B 7/004 for measuring coordinates of points
• CPC Class Codes: G06F 3/044 by capacitive means
• CPC Class Codes: G06F 3/0447 Position sensing using the local deformation of sensor cells

Abstract

A capacitive tactile sensor array is formed of capacitive plates formed on a dielectric substrate, on which large area electronics is also deposited. A conductive film is spaced from the capacitive plates, to form the other plates of the sensor capacitors. This conductive film may be grounded. The large area electronics includes a circuit that provides outputs corresponding to the pressure applied to each of the sensor capacitors. A method is also disclosed for controlling the circuit to provide an output corresponding to the pressure applied to the conductive film.

Claims

1. A tactile capacitive sensor array comprising a substrate having a first surface, an integrated electronic circuit formed on said first surface, said circuit having a plurality of spaced apart first capacitor electrodes, output and input terminals, and active electronic elements separately coupling said capacitor electrodes to said input and output conductors, and second capacitor electrode means spaced from said surface, said second capacitor electrode means having conductive regions aligned with a plurality of said first capacitor electrodes to form a plurality of sensor capacitors therewith, and a potential applying arrangement connected to said second capacitor electrode means.

2. The tactile capacitive sensor array of claim 1 wherein said substrate circuit and second capacitor electrode means are substantially optically transparent.

3. The tactile capacitive sensor array of claim 1 wherein said first capacitor electrodes are arranged in rows and columns.

4. The tactile capacitive sensor array of claim 1 wherein said active electronic elements comprise means for selectively charging said sensor capacitors, integrating amplifier means, and means for selectively applying charges on said sensor capacitors to said integrating amplifier means, whereby the output of said integrating amplifier means corresponds to pressure applied to a respective sensor capacitor.

5. The tactile capacitive sensor array of claim 1 wherein said second capacitor electrode means are connected in common to a fixed potential.

6. A tactile capacitive sensor array comprising a plurality of capacitor sensors each having a first electrode and a second electrode, integrating amplifier means, a source of a charging voltage, means for selectively connecting said sensor electrodes to said source and said integrating amplifier means and means connecting said second electrodes in common to a point of fixed potential.

7. The tactile capacitive sensor array of claim 6 wherein said means for selectively connecting said sensor electrodes comprise TFTs.

8. The tactile capacitive sensor array of claim 6 wherein said capacitor sensors are arranged in a matrix of a plurality of rows and columns, and said means for selectively connecting said sensor electrodes comprises transistor means connected to selectively charge all of the capacitors of a row, and transistor means for selectively connecting said capacitors to discharge via said integrating amplifier means.

9. The tactile capacitive sensor array of claim 8 wherein said integrating amplifier means comprises a separate integrating capacitor for each column of said capacitors, and said transistor means for selectively connecting said capacitors to discharge via said integrating amplifier means comprises means for discharging said capacitors of a given row via separate said amplifiers.

10. The tactile capacitive sensor array of claim 8 further comprising a fixed capacitor for each of the columns of said matrix, said selectively connecting means comprising means for selectively connecting said fixed capacitors to said source and integrating amplifier means.

11. The tactile capacitive sensor array of claim 6 wherein said first electrodes, integrating amplifier means and selectively connecting means are arranged on a common substrate.

12. The tactile capacitive sensor array of claim 11 wherein said second electrode means comprises a common conductive film forming said sensor capacitors with each of said first electrode means.

13. A method for sensing pressure on sensor capacitors of a tactile array having a matrix of a plurality of first capacitor plates arranged in rows and columns, said first capacitor plates forming sensing capacitor electrodes in combination with at least one other capacitor plate, said method comprising:

charging a given row of said sensor capacitors;

then selectively discharging said sensor capacitors to integrating amplifier means,

whereby the outputs of said amplifier means correspond to the pressure applied to the sensor capacitors of the respective rows of capacitors.

14. The method of claim 13 wherein said step of charging said sensor capacitors comprises coupling a voltage source to the first capacitor plates of a row of said sensor capacitors while isolating said first capacitor plates from said integrating amplifier means, and said step of discharging said sensor capacitors comprises discharging said sensor capacitors to said integrating amplifier means while isolating said first capacitor plates from said source of voltage.

15. The method of claim 14 wherein said step of discharging comprises discharging said sensor capacitors to separate integrating amplifiers.