Integrated circuit inductor

• US 5,227,659 A
• Filed: 12/27/1991
• Issued: 07/13/1993
• Est. Priority Date: 06/08/1990
• Status: Expired due to Fees

• Current Assignee: Boston University
• Original Assignee: Trustees of Boston University
• Inventors: Hubbard, Allyn E.
• Primary Examiner(s): CARROLL, JAMES J
• Application Number:
  US07/815,834
• Time in Patent Office: 564 Days
• Field of Search: 357/51, 357/27, 257/422, 257/531, 257/622, 257/635, 257/741, 257/773
• US Class Current: 257/531
• CPC Class Codes: H01L 27/08 including only semiconductor components of a single kind

Abstract

An integrated circuit inductor is disclosed which can be fabricated by adding simple follow-on steps to standard fabrication line processes. In a preferred embodiment, standard CMOS technology is used to fabricate a multi-turn coil having its axis normal to the layers of oxide, polysilicon, and metal which form the coil. For a coil 100 microns on a side, an inductance on the order of 10 nH can be achieved. By including a magnetic core in the design using the disclosed procedure, this value can be increased to as high as 0.1 mH. Thus, inductor values ranging from 0.001 mH-0.1 mH can be physically implemented as integrated, highly-miniaturized CMOS designs for analog operation in the range of approximately 1-100 MHz.

Claims

1. An integrated circuit inductor comprising:

a substrate having a substantially planar surface,

a conducting loop with two ends deposited on said surface, the loop being in a plane substantially parallel to said substrate surface to form a coil having its axis substantially normal to the substrate surface,

an insulating layer over said conducting loop, and

magnetic material over said insulating layer such as magnetic material extends into said coil.

5. The inductor of claim 1 wherein the conducting loop is a material selected from the group consisting of metal, polysilicon, and diffused silicon.

9. The inductor of claims 2, 1 or 6 wherein said substrate is silicon and further comprising an open conducting loop of diffused silicon in the silicon substrate, the loop having two ends and being in a plane substantially parallel to said substrate surface, one end of said loop connected by a conducting segment to said coil to form a loop of said coil.

10. The inductor of claims 2, 1 or 6 wherein said magnetic material is a ferromagnetic material.

11. The inductor of claims 2, 1 or 6 wherein said magnetic material is a ceramic composite.

2. An integrated circuit inductor comprising:

a substrate having a substantially planar surface,

alternating conducting and insulating layers deposited on said surface, terminating with a final insulating layer, each conducting layer patterned to form one open conducting loop with two ends, the loop being in a plane substantially parallel to said substrate surface, and each insulating layer between two adjacent conducting loops including a conducting segment, the conducting segment connecting one end of each of the two loops to form a coil having its axis substantially normal to the substrate surface, and

magnetic material over said final insulating layer such that magnetic material extends into said coil.

6. The inductor of claim 2 wherein said substrate is silicon, each said insulating layer is silicon dioxide, and said coil comprises three conducting loops, wherein one of said conducting loops is polysilicon and two of said conducting loops are metal.

7. The inductor of claim 2 wherein each conducting layer is a material selected from the group consisting of metal, polysilicon, and diffused silicon.

8. The inductor of claim 2 wherein each insulating layer is silicon dioxide.

3. An integrated circuit inductor comprising:

a substrate having a substantially planar surface,

alternating conducting and insulating layers deposited on said surface, each conducting layer patterned to form one open conducting loop with two ends, the loop being in a plane substantially parallel to said substrate surface, and each insulating layer between two adjacent conducting loops including a conducting segment, the conducting segment connecting one end of each of the two loops to form a coil having its axis substantially normal to the substrate surface, wherein said substrate in silicon, each said insulating layer is silicon dioxide, and said coil comprises three conducting loops, wherein one of said conducting loops is polysilicon and two of said conducting loops are metal.

4. An integrated circuit inductor comprising:

a substrate having a substantially planar surface,

alternating conducting and insulting layers deposited on said surface, each conducting layer patterned to form one open conducting loop with two ends, the loop being in a plane substantially parallel to said substrate surface, and each insulating layer between two adjacent conducting loops including a conducting segment, the conducting segment connecting one end of each of the two loops to form a coil having its axis substantially normal to the substrate surface, wherein said substrate is silicon and further comprising an open conducting loop of diffused silicon in the silicon substrate, the loop having two ends and being in a plane substantially parallel to said substrate surface, one end of said loop connected by a conducting segment to said coil to form a loop of said coil.