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Apparatus for optical materials fabrication by ultrasonic machining

  • US 5,230,182 A
  • Filed: 07/31/1992
  • Issued: 07/27/1993
  • Est. Priority Date: 07/31/1992
  • Status: Expired due to Term
First Claim
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1. An apparatus for performing ultrasonic machining of a surface of an optical material to remove matter from the surface thereof smoothly and precisely, said apparatus comprising:

  • an ultrasonic transducer;

    a slurry of abrasive particles on the surface of said optical material;

    a tool for directing ultrasonic vibrations from said ultrasonic transducer to the slurry on the surface of said optical material;

    a coupler coupling said ultrasonic transducer and said tool so as to direct ultrasonic vibrations from said ultrasonic transducer to said tool;

    a multi-dimensional translation stage positioned proximal to said tool so as to provide a movable platform for holding said optical material in the vicinity of said tool; and

    means for counterbalancing a force exerted by said tool on the surface of said optical material, said counterbalancing means including means for supporting said multi-dimensional translation stage on a counterbalance stage.

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