Method of forming conductive material selectively

• US 5,231,054 A
• Filed: 12/03/1990
• Issued: 07/27/1993
• Est. Priority Date: 12/20/1989
• Status: Expired due to Fees

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Kosugi, Makoto
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): HOLTZMAN, LAURA
• Application Number:
  US07/621,148
• Time in Patent Office: 967 Days
• Field of Search: 437/192, 437/194, 437/195
• US Class Current: 438/648
• CPC Class Codes: H01L 21/76879 by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating plating on semiconductors in general H01L21/288
• CPC Class Codes: H01L 23/53242 the principal metal being a noble metal, e.g. gold
• CPC Class Codes: H01L 23/5329 Insulating materials
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

The CVD W deposition process is observed while changing the substrate temperature, with IR thermometer measurement. The temperature indicated changes with emissivity depending on the surface morphology and materials.

As the response time of this measurement is short, it is possible to perform in situ observation of changing surface morphology. This is a valid method to evaluate the deposition process. On a silicon substrate, the indicated temperature increases rapidly as soon as the gas flow starts, i.e. as soon as tungsten is deposited on the substrate. The indicated temperature increases in two steps. One is for silicon reduction and the other is for hydrogen reduction. Furthermore, it is found that the start of deposition on insulators is delayed. This phenomenon is related to the selective deposition. The thickness of deposited tungsten films can on insulatars be estimated by measuring the delay time and the thickness of tungsten on silicon.

The reaction process for silicon and hydrogen reduction is evaluated by this method. We found that within 10 seconds the silicon reduction was finished and the hydrogen reduction started. We also found that optimum silicon reduction enhances the selectivity.

Claims

1. A method of selectively forming conductive material on a substrate, said method comprising the steps of:

forming a first dielectric film layer on the substrate;

forming a second dielectric film layer as an upper most layer on top of said first dielectric film layer using a beam-assisted deposition method;

selectively forming a via hole through said first dielectric film layer and said second dielectric film layer; and

selectively depositing a conductive material film in said via hole whereby said conductive material film does not substantially grow on said first dielectric film layer and said second dielectric film layer.

2. A method of according to claim 1, said method further comprising the steps of:

forming a first conductive material wiring between the substrate and said first dielectric film layer, whereby said first conductive material wiring is in contact with said conductive material film filled in said via hole; and

forming a second conductive material wiring on said second dielectric film layer covering said conductive material film filled in said via hole.

3. A method of according to claim 1 or 2, wherein the substrate is selected from the group comprising silicon semiconductor material or a compound semiconductor, conductive material and insulator material.

4. A method according to claim 1, further comprising the step of:

forming a third dielectric film layer on the substrate and under said first dielectric film layer whereby said first dielectric film layer is selected from the group comprising PMSS (silylated polymethyl silsesquioxane) film, polyimide film and SOG film, and said third dielectric film layer is selected from the group comprising silicon dioxide, silicon nitride, and silicon oxide nitride.

5. A method according to claim 4, wherein said second dielectric film layer is selected from the group comprising silicon dioxide and silicon nitride.

6. A method according to claim 1, 4 or 5, wherein said via hole is formed by the RIE (reactive ion etching) using fluorine containing reactant gas.

7. A method according to claim 1, wherein said conductive material film is selected from the group comprising tungsten and molybdenum formed by a selective CVD (chemical vapor deposition) method.

8. A method according to claim 2, wherein said first and second conductive material wirings are selected from the group comprising double layered structure film of titanium (Ti)/gold (Au), titanium tungsten (TiW)/Au, triple layered structure film of TiW/Au/TiW, TiW/Au/molybdenum (Mo), Ti/Au/platinum (Pt) and single layer of aluminum (Al), tungsten W, polysilicon and metal silicide.

9. A method according to claim 4, wherein said first dielectric film layer is formed by annealing PMSS coated on a silicon substrate using a spin coating method for an hour at 350°

C., said first dielectric film layer being formed with a thickness of about 1.5 μ

m.

10. A method according to claim 5, wherein said second dielectric film layer is formed with a temperature of the substrate in the range from room temperature to 400°

C. using an oxygen ion beam assisted deposition method, oxygen ions being accelerated by a voltage of 1.25 KV.

11. A method according to claim 1 or 7, wherein the selective CVD of tungsten is carried out using a mixed gas of tungsten hexafluoride (WF₆), Silane (SiH₄) and hydrogen (H₂) as a reactant gas with a temperature of the substrate in the range from 200°

to 400°

C.

12. A method according to claim 8, wherein said first and second conductive material wirings are formed from titanium-gold using a sputtering method depositing a titanium film with a thickness of 10 nm followed by depositing a gold film with a thickness of 700 nm.

13. A method according to claim 10, wherein said second dielectric film layer is formed with a temperature of the substrate in the range from 200°

to 310°

C.

14. A method according to claim 11, wherein the selective CVD of tungsten is carried out with a temperature of the substrate in the range from 250°

to 310°

C.

15. A method according to claim 1, wherein forming said second dielectric film layer as an upper most layer using an ion beam-assisted deposition method produces a nucleation site density of 0.3 nuclei per square centimeter.