Semiconductor acceleration detecting apparatus
First Claim
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1. A semiconductor acceleration detecting apparatus comprising:
- a support board;
a deflectable acceleration detection beam having opposed first and second ends and including a groove between the first and second ends;
a strain resistor disposed on the beam opposite the groove;
a supporting base mounted on the board, the first end of the acceleration detection beam being mounted on the supporting base, the weight being displaced in response to acceleration of the apparatus;
a weight mounted on the second end of the acceleration detection beam; and
a limit stop mounted on the board surrounding and spaced from the weight when the apparatus is not subjected to an acceleration for limiting displacement of the weight in response to acceleration of the apparatus in two orthogonal directions.
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Abstract
The fixed end of an acceleration detection beam of a semiconductor acceleration detecting apparatus is mounted onto a board through a supporting base. A weight for increasing the sensitivity to acceleration is disposed on the free end of the acceleration detection beam. A limit stop for limiting excessive displacement of the weight in two directions surrounds part of the weight. Therefore, the displacement of the weight can be controlled with a high degree of accuracy. Resistance to impact is also improved.
26 Citations
2 Claims
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1. A semiconductor acceleration detecting apparatus comprising:
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a support board; a deflectable acceleration detection beam having opposed first and second ends and including a groove between the first and second ends; a strain resistor disposed on the beam opposite the groove; a supporting base mounted on the board, the first end of the acceleration detection beam being mounted on the supporting base, the weight being displaced in response to acceleration of the apparatus; a weight mounted on the second end of the acceleration detection beam; and a limit stop mounted on the board surrounding and spaced from the weight when the apparatus is not subjected to an acceleration for limiting displacement of the weight in response to acceleration of the apparatus in two orthogonal directions.
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2. A semiconductor acceleration detecting apparatus comprising:
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a support board; a deflectable cantilevered acceleration detection beam having opposed first and second ends; a supporting base mounted on the board, the first end of the cantilevered acceleration detection beam being mounted on the supporting base, the weight being displaced in response to acceleration of the apparatus; a weight mounted on the second end of the cantilevered acceleration detection beam; and a limit stop mounted on the board surrounding and spaced from the weight when the apparatus is not subjected to an acceleration for limiting displacement of the weight in response to acceleration of the apparatus in two orthogonal directions.
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Specification
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Current AssigneeMitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
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Original AssigneeMitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
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InventorsYamamoto, Masahiro
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Primary Examiner(s)LaRoche, Eugene R.
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Assistant Examiner(s)Nguyen, Viet Q.
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Application NumberUS07/846,009Time in Patent Office517 DaysField of Search73/517 R, 73/517 AV, 73/517 B, 73/526, 73/516 R, 73/514, 357/26, 357/74, 257/414, 257/420, 257/415, 257/417US Class Current73/514.33CPC Class CodesG01P 15/12 by alteration of electrical...G01P 2015/0828 the mass being of the paddl...H01L 2224/48091 ArchedH01L 2924/00014 the subject-matter covered ...
