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Method of producing tungsten-titanium sputter targets and targets produced thereby

  • US 5,234,487 A
  • Filed: 04/15/1991
  • Issued: 08/10/1993
  • Est. Priority Date: 04/15/1991
  • Status: Expired due to Term
First Claim
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1. A method for preparing a tungsten-titanium sputter target having substantially no β

  • (Ti, W) phase present and exhibiting improvement in reduction of particulate emission upon sputtering, comprising;

    (a) providing powders of said tungsten and titanium wherein said titanium powder is present in an amount of about 1-20 wt. % based on the total weight of said tungsten and titanium powders provided;

    (b) compacting said powders at a pressure of from about 200 to 1,000 MPa; and

    (c) heating said powders at a temperature from about 600°

    -882°

    C.

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