Stepped mold inserts, a process for the manufacture of stepped mold inserts, and stepped microstructural bodies with the mold inserts

• US 5,234,571 A
• Filed: 11/24/1992
• Issued: 08/10/1993
• Est. Priority Date: 12/19/1991
• Status: Expired due to Term

• Current Assignee: Microparts GmbH
• Original Assignee: Microparts GmbH
• Inventors: Noeker, Friedolin F.
• Primary Examiner(s): TUFARIELLO, THOMAS
• Application Number:
  US07/980,690
• Time in Patent Office: 259 Days
• Field of Search: 205/70
• US Class Current: 205/70
• CPC Class Codes: C25D 1/10 Moulds; Masks; Masterforms
• CPC Class Codes: G03F 7/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor using photoresist structures for special production processes, see the relevant places, e.g. B44C, H01L, e.g. H01L21/00, H05K

Abstract

A process to manufacture stepped mold inserts and stepped microstructural bodies molded with the mold inserts. Stepped mold inserts are manufactured using structured irradiation masks with regionally different absorption for x-radiation; to this end, extensive calculations are necessary. Furthermore, several masks can be used in succession and for each irradiation step the penetration depth of the x-radiation can be changed. These masks must be positioned with high precision. With the present process stepped mold inserts are manufactured by a simple procedure. Several layers of varying thickness are applied on a metal plate alternating with non-conductive and conductive material. The layered stack is prestructured by precision mechanical machining at depths that vary from region to region, filled with a resist material and irradiated preferably through a single structured mask. Following the "development" of the resist layer, metal is electrodeposited in the microstructure and the metallic mold insert is separated from the resist structure.

Claims

1. A process for the manufacture of stepped mold inserts utilized to mold stepped microstructural bodies, comprising the steps of:

applying an electrically non-conductive layer on a base plate made of an electrically conductive material such that the thickness of the non-conductive layer substantially corresponds to the height of the step;

applying an electrically conductive layer on the non-conductive layer such that the thickness of the conductive layer is less than the thickness of the non-conductive layer;

prestructuring the layers applied on the base plate by precision mechanical machining to remove regions of the layers such that the removed regions reach down to the conductive base plate;

filling the removed regions and covering the base plate with a resist material, whose thickness corresponds to the entire height of the microstructural body to be molded;

irradiating the resist layer through at least one structured mask;

dissolving regions of the resist material that have remained soluble or have become soluble;

electrodepositing a metal in those regions from which the resist material was dissolved out and covering all regions with a layer of metal that is one to several millimeters thick; and

removing the base plate and dissolving out the remaining parts of the conductive and non-conductive layers for obtaining the stepped mold insert.

2. The process as claimed in claim 1, wherein said step of applying an electrically non-conductive layer on the base plate comprises the steps of:

repeatedly applying an electrically non-conductive layer whereby the thickness of each non-conductive layer alone or together with one or more non-conductive layers above the same corresponds to the height of one step, alternating with the application of one thin electrically conductive layer; and

the prestructuring step comprises the step of;

prestructuring the applied layers by precision mechanical machining to remove regions of the layers, whereby each removed region ends on a conductive layer and optionally penetrates several non-conductive and conductive layers.

3. The process as claimed in claim 1, wherein the filling step comprises the step of:

filling the removed regions and covering the plate with a positive resist whose thickness corresponds to the total thickness of the microstructural body to be molded; and

the irradiating step comprises the step of;

irradiating the resist layer through at least one structured mask, whereby mechanically machined walls of the applied layers produced by the machining lie preferably in the regions shaded by the mask.

4. The process, as claimed in claim 3, wherein:

the side walls produced by precision mechanical machining lie partially within the regions of the positive resist that are shaded by the structured mask.

5. The process as claimed in claim 2, wherein the filling step comprises the step of:

filling the removed regions and covering the plate with a negative resist whose thickness corresponds to the total thickness of the microstructural body to be molded; and

the irradiating step comprises the step of;

irradiating the resist layer through at least one structured mask, whereby mechanically machined walls produced by the machining of the applied layers lie preferably in the regions not shaded by the mask.

6. The process as claimed in claim 5, wherein:

the side walls produced by precision mechanical machining lie partially within the regions of the negative resist that are not shaded by the structured mask.

7. A stepped mold insert, manufactured according to the process of one of claims 4 or 6.

8. A stepped microstructural body, manufactured by molding a stepped mold insert, as claimed in claim 7, wherein:

microstructures with at least two steps in a one-piece body are molded differently and exhibit different or identical heights; and

the microstructures comprise changing lateral dimensions, based on the total height of the microstructural body.

9. A stepped microstructural body made of plastic, ceramic, or sintered material, manufactured by mechanical shaping of a stepped mold insert, as claimed in claim 7, wherein:

the microstructural body is removed from the mold insert; and

the mold insert is used repeatedly for molding.

10. A stepped microstructural body made of metal, manufactured by galvanic molding of a stepped mold insert, as claimed in claim 7, wherein:

the mold insert is dissolved out following molding and the metallic microstructural body is obtained.