Nanochannel filter
First Claim
Patent Images
1. A method for forming a filter comprising the steps of:
- inserting acid etchable glass rods into respective inert hollow glass tubes;
heating said rods and tubes to fuse each respective rod to a respective tube;
drawing each of said fused rods and tubes to reduce the diameter of the rods and tubes to thereby form a filament;
stacking a plurality of said filaments together to form a stack of filaments;
heating the stack of filaments to fuse the filaments together to form an elongated bar having a plurality of channels filled with etchable glass;
drawing said bar until each of the channels has a diameter of less than 1 micron;
cutting the elongated bar to form a wafer-like filter;
annealing the filter at an elevated temperature; and
acid etching the etchable glass in the wafer-like filter to form channels therethrough having an average diameter of less than about 1 micron.
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Abstract
The present invention provides a wafer-like glass filter having channels therethrough having an average diameter of less than 1 micron, and further provides methods of making the filter.
85 Citations
11 Claims
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1. A method for forming a filter comprising the steps of:
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inserting acid etchable glass rods into respective inert hollow glass tubes; heating said rods and tubes to fuse each respective rod to a respective tube; drawing each of said fused rods and tubes to reduce the diameter of the rods and tubes to thereby form a filament; stacking a plurality of said filaments together to form a stack of filaments; heating the stack of filaments to fuse the filaments together to form an elongated bar having a plurality of channels filled with etchable glass; drawing said bar until each of the channels has a diameter of less than 1 micron; cutting the elongated bar to form a wafer-like filter; annealing the filter at an elevated temperature; and acid etching the etchable glass in the wafer-like filter to form channels therethrough having an average diameter of less than about 1 micron. - View Dependent Claims (2, 3, 4, 8)
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5. A method for forming a filter comprising the steps of:
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stacking acid etchable glass filaments with acid inert glass filaments to form a stack of filaments having an oriented array of acid etchable glass filaments; heating the stack of filaments to fuse the filaments together to form an elongated bar having a plurality of channels filled with etchable glass; drawing said bar until each of the channels has a diameter of less than 1 micron; cutting the elongated bar to form a wafer-like filter; annealing the filter at an elevated temperature; and acid etching the etchable glass in the wafer-like filter to form channels therethrough having an average diameter of less than about 1 micron. - View Dependent Claims (6, 7, 9, 10, 11)
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Specification