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Nanochannel filter

  • US 5,234,594 A
  • Filed: 06/12/1992
  • Issued: 08/10/1993
  • Est. Priority Date: 06/12/1992
  • Status: Expired due to Term
First Claim
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1. A method for forming a filter comprising the steps of:

  • inserting acid etchable glass rods into respective inert hollow glass tubes;

    heating said rods and tubes to fuse each respective rod to a respective tube;

    drawing each of said fused rods and tubes to reduce the diameter of the rods and tubes to thereby form a filament;

    stacking a plurality of said filaments together to form a stack of filaments;

    heating the stack of filaments to fuse the filaments together to form an elongated bar having a plurality of channels filled with etchable glass;

    drawing said bar until each of the channels has a diameter of less than 1 micron;

    cutting the elongated bar to form a wafer-like filter;

    annealing the filter at an elevated temperature; and

    acid etching the etchable glass in the wafer-like filter to form channels therethrough having an average diameter of less than about 1 micron.

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