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Anti-reflective transparent coating with gradient zone

  • US 5,234,748 A
  • Filed: 06/19/1991
  • Issued: 08/10/1993
  • Est. Priority Date: 06/19/1991
  • Status: Expired due to Fees
First Claim
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1. An article comprising a substrate having a surface and an anti-reflective layer on the surface of the substrate, the anti-reflective layer comprising a first zone of Si1-x Qx, a gradient zone of Si1-x Qx Oy over the first zone wherein y has a value increasing with distance from the surface of the substrate from zero to 2, and a third zone of SiO2 over the gradient zone, Q and x being independently selected for the first and gradient zones, Q being selected from H, for which the value of x is from zero to 0.5, and N, for which the value of x is from zero to 0.58, wherein the first zone is 1 to 8 nm thick, the value of y increases substantially continuously in the gradient zone and the gradient zone is 3 to 160 nm thick, and the third zone is 30 to 500 nm thick.

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