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Methods of fabricating integrated, aligned tunneling tip pairs

  • US 5,235,187 A
  • Filed: 04/14/1992
  • Issued: 08/10/1993
  • Est. Priority Date: 05/14/1991
  • Status: Expired due to Term
First Claim
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1. A submicron tip structure, comprisinga substrate;

  • support means spaced above said substrate; and

    a pair of self-aligned, opposed sensing tips, each tip having an end portion with at least one dimension in the nanometer size range, one of said pair of tips being integral with said support means and the other being integral with said substrate, said tips being closely spaced to define a gap therebetween.

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