Multi-layered mirror

• US 5,239,566 A
• Filed: 07/10/1992
• Issued: 08/24/1993
• Est. Priority Date: 08/09/1991
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Nakamura, Hiroshi, Nagata, Hiroshi, Murakami, Katsuhiko
• Primary Examiner(s): Porta, David P.
• Assistant Examiner(s): WONG, DON KITSUN
• Application Number:
  US07/911,493
• Time in Patent Office: 410 Days
• Field of Search: 378/43, 378/70, 378/71, 378/76, 378/84, 359/586-589
• US Class Current: 378/43
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G21K 1/062 Devices having a multilayer structure
• CPC Class Codes: G21K 2201/061 characterised by a multilayer structure
• CPC Class Codes: G21K 2201/064 having a curved surface

Abstract

For obtaining a high reflectivity, even when the thickness of periodic structure is reduced, in a multi-layered mirror consisting of alternate layers of a first substance showing a larger difference vacuum in the refractive index in the soft X-ray region and a second substance showing a smaller difference, a nickel-chromium alloy containing chromium in at least 5 wt. % is used as the first substance of larger difference. In a preferred form of the mirror, the second substance of smaller difference in refractive index is vanadium oxide.

Claims

1. A multi-layered mirror comprising:

a substrate;

first layers of a first substance; and

second layers of a second substance;

wherein said first layers and said second layers are alternately laminated on said substrate;

the difference in refractive index in the soft X-ray region of said first substance from vacuum is larger than that of said second substance; and

said first substance is a nickel-chromium alloy containing chromium in a proportion of 5% by weight or larger, or of pure chromium.

2. A multi-layered mirror according to claim 1, wherein said second substance is selected from the group consisting of vanadium oxide, silicon oxide and carbon.

3. An ellipsoidal multi-layered condenser mirror comprising:

a substrate;

first layers of a first substance; and

second layers of a second substance;

wherein said first layers and said second layers are alternately laminated on said substrate;

the difference in refractive index in the soft X-ray region of said first substance from vacuum is larger than that of said second substance; and

said first substance is a nickel-chromium alloy containing chromium in a proportion of 5% by weight or larger.

4. A multi-layered condenser mirror according to claim 3, wherein said second substance is selected from the group consisting of vanadium oxide, silicon oxide and carbon.

5. An X-ray microscope comprising:

an ellipsoidal multi-layered condenser mirror including a substrate, first layers of a first substance, and second layers of a second substance, with said first layers and said second layers being alternately laminated on said substrate, the difference in refractive index in the soft X-ray region of said first substance from vacuum being larger than that of said second substance, and said first substance being a nickel-chromium alloy containing chromium in a proportion of 5% by weight or larger;

an X-ray source and a specimen positioned respectively on two focal points of said condenser mirror;

an imaging optical system capable of focusing X-rays; and

a detector for detecting X-rays irradiating the specimen.

6. An X-ray microscope according to claim 5, wherein said second substance is selected from the group consisting of vanadium oxide, silicon oxide and carbon.

7. An X-ray microscope according to claim 6, wherein said imaging optical system includes a zone plate.

8. An X-ray microscope according to claim 5 wherein said imaging optical system includes a zone plate.

9. A multi-layered mirror comprising:

a substrate;

first layers of a first substance; and

second layers of a second substance;

wherein said first layers and said second layers are alternately laminated on said substrate;

the difference in refractive index in the soft X-ray region of said first substance from vacuum is larger than that of said second substance; and

said second substance is vanadium oxide.

10. A multi-layered mirror according to claim 9, wherein said first substance is chromium alloy.

11. An ellipsoidal multi-layered condenser mirror, comprising:

a substrate;

first layers of a first substance; and

second layers of a second substance;

wherein said first layers and said second layers are alternatively laminated on said substrate;

the difference in refractive index in the soft X-ray region of said first substance from vacuum is larger than that of said second substance; and

said second substance is vanadium oxide.

12. An ellipsoidal multi-layered condenser mirror according to claim 11, wherein said first substance is chromium alloy.

13. An X-ray microscope comprising:

an ellipsoidal multi-layered condenser mirror including a substrate, first layers of a first substance, sand second layers of a second substance, with said first layers and said second layers being alternately laminated on said substrate, the difference in refractive index in the soft X-ray region of said first substance from vacuum being larger than that of said second substance, and said second substance being vanadium oxide;

an X-ray source and a specimen positioned respectively on two focal points of said condenser mirror;

an imaging optical system capable of focusing X-rays; and

a detector for detecting X-rays irradiating the specimen.

14. An X-ray microscope according to claim 13;

wherein said first substance is chromium alloy.

15. An X-ray microscope according to claim 14, wherein said imaging optical system includes a zone plate.

16. An X-ray microscope according to claim 13, wherein said imaging optical system includes a zone plate.