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Semiconductor acceleration sensor with reduced cross axial sensitivity

  • US 5,239,870 A
  • Filed: 09/20/1991
  • Issued: 08/31/1993
  • Est. Priority Date: 09/21/1990
  • Status: Expired due to Fees
First Claim
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1. A semiconductor accelerator sensor, comprising:

  • a frame;

    a first cantilever beam with its fixed end attached to the frame, having a first weight portion on its free end;

    first sensor means for detecting an acceleration, formed by piezoresistors provided in a vicinity of the fixed end of the first cantilever beam;

    a second cantilever beam with its fixed end attached to the frame, having a second weight portion on its free end, the second cantilever beam having an overall shape identical to that of the first cantilever beam, and oriented along a direction opposite to that along which the first cantilever beam is oriented; and

    second sensor means for detecting an acceleration, formed by piezoresistors provided in a vicinity of the fixed end of the second cantilever beam, the piezoresistors of the second sensor means being connected with the piezoresistors of the first sensor means to form a bridge circuit, wherein the piezoresistors of the second sensor means are arranged to be oriented along a direction perpendicular to the direction along which the piezoresistors of the first sensor means are arranged to be oriented.

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