Circuit for detecting and diverting an electrical arc in a glow discharge apparatus

• US 5,241,152 A
• Filed: 03/23/1990
• Issued: 08/31/1993
• Est. Priority Date: 03/23/1990
• Status: Expired due to Fees

• Current Assignee: Applied Films Corp. (Applied Materials Incorporated)
• Original Assignee: Halmar Electronics, Inc.
• Inventors: Hammond, Peter W., Yotive, David S., Anderson, Glen L.
• Primary Examiner(s): Paschall, Mark H.
• Application Number:
  US07/498,343
• Time in Patent Office: 1,257 Days
• Field of Search: 219/121.54, 219/121.57, 219/121.36, 219/76.16, 219/121.43, 316/111.21, 316/101, 316/123, 204/298.35
• US Class Current: 219/121.57
• CPC Class Codes: H01J 37/32018 Glow discharge
• CPC Class Codes: H02H 7/00 Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions

Abstract

An arc diverter detects an arc between the cathode and the anode of a glow discharge apparatus and in response to arc detection, actuates a switching network that triggers a pair of switches to allow a capacitor to discharge toward the cathode along a resonant diverting path and recharge the capacitor for subsequent discharge in an opposite direction. This discharge current effectively short circuits the power supply and extinguishes the arc. The resonant diverting circuit includes two resonant diverting paths and four switches configured in an "H" to hold the capacitor in a charged condition. Alternate triggering of the diagonally situated pairs of switches enables the charged capacitor to discharge in one direction along one of the resonant diverting paths and recharge for subsequent discharge in the opposite direction, along the other of the resonant paths. Both resonant diverting paths provide discharge toward the cathode.

Claims

1. An arc diverter for extinguishing an arc in a glow discharge apparatus comprising:

a detector adapted to detect an arc between two electrodes of a glow discharge apparatus;

a resonant diverting circuit adapted to discharge a stored charge along one of two resonant diverting paths to divert electrical current from said electrodes to extinguish the arc and restore said charge for subsequent discharge along the other of the two resonant diverting paths, said resonant diverting circuit including a capacitor for holding said stored charge, the capacitor being dischargeable and rechargeable in two directions and lying in both of said resonant diverting paths; and

a switching network actuated by the detector to trigger the resonant diverting circuit to divert the electrical current along a first of the resonant diverting paths upon an initial actuation by the detector, along a second of the paths upon a subsequent actuation by the detector, and to alternate current diversion between the two paths thereafter upon subsequent arc detections.

2. The arc diverter of claim 1 wherein said resonant diverting circuit further comprises:

an inductor in series with the capacitor and having an inductance selected to provide discharging and recharging of said diverting circuit within about 1000 microseconds.

3. The arc diverter of claim 1 wherein said resonant diverting circuit further includes a diode which lies in both of said diverting paths.

4. The arc diverter of claim 1 wherein said resonant diverting circuit further comprises:

four switches, a first pair of said switches forming part of a first resonant diverting path and adapted to be triggered simultaneously by the switching network to discharge said stored charge along said first resonant diverting path and to restore said charge for subsequent discharge along a second of said resonant diverting paths, a second pair of said switches forming part of said second resonant diverting path and adapted to be triggered simultaneously by the switching network to discharge said stored charge along said second resonant diverting path and to restore said charge for subsequent discharge along said first resonant diverting path.

5. The arc diverter of claim 4 wherein the four switches in the diverting circuit are SCRs.

6. The arc diverter of claim 1 wherein the resonant diverting circuit further comprises:

four switches isolating the capacitor and holding it in a charged condition between the electrodes, a first pair of said switches forming part of a first resonant diverting path and triggered simultaneously by the switching network to enable discharging of the capacitor in a first direction along the first resonant diverting path to divert current from the electrodes and recharge the capacitor for subsequent discharge in an opposite direction, a second pair of the switches forming part of a second resonant diverting path and triggered simultaneously by the switching network to enable discharge of the capacitor in said opposite direction and along said second resonant diverting path to divert current from the electrodes and recharge the capacitor for subsequent discharge in said first direction.

7. The arc diverter of claim 6 wherein the resonant diverting circuit further comprises:

an inductor in series with the capacitor and having an inductance selected to provide discharging and recharging of said capacitor within about 100 microseconds.

8. The arc diverter of claim 6 wherein the four switches are SCRs.

9. The arc diverter circuit of claim 1 wherein said detector further comprises:

a counter to count the number of times an arc has been detected.

10. The arc diverter of claim 1 wherein said switching network further comprises:

means for sensing current flow through said diverting circuit to establish a time duration before the next triggering of said resonant diverting circuit.

11. The arc diverter of claim 4 wherein said switching network further comprises:

means for assuring that said first and second pairs of switches are not triggered simultaneously.

12. The arc diverter of claim 1 wherein said detector further includes a comparator for comparing the voltage across the electrodes with a predetermined set voltage and further comprising:

a potentiometer for varying the predetermined set voltage.

13. The arc diverter of claim 1 wherein said switching network further comprises:

a retrigger circuit to retrigger said resonant diverting circuit if a first current pulse does not extinguish the detected arc.

14. The arc detector of claim 13 wherein said retrigger circuit further comprises:

a start up circuit to inhibit said retrigger circuit until a predetermined time delay has elapsed.

15. The combination of claim 1 wherein the glow discharge apparatus includes a cathode and the switching network diverts electrical current toward the capacitor.

16. An arc diverter for extinguishing an arc in a glow discharge apparatus comprising:

a detector adapted to detect an arc between two electrodes of a glow discharge apparatus;

a switching network actuated by the detector upon detection of an arc; and

a resonant diverting circuit including a capacitor and four switches, the capacitor adapted to be electrically isolated in a charged condition between said electrodes by said four switches;

a first pair of said four switches forming part of a first resonant diverting path and adapted to be triggered simultaneously by the switching network upon initial detection of an arc to enable discharge of the capacitor in a first direction to divert electrical current from the electrodes and extinguish the arc and to recharge the capacitor for subsequent discharge in an opposite direction; and

a second pair of said switches forming part of a second resonant diverting path and adapted to be triggered simultaneously by the switching network upon the next detection of an arc to enable discharge of the capacitor in a second direction along the second resonant diverting path to divert electrical current from the electrodes and extinguish the arc and to recharge the capacitor for subsequent discharge in said first direction, said first and second pairs of switches being alternately triggered by said switching network upon subsequent actuations.

17. The arc diverter of claim 16 wherein the resonant diverting circuit further comprises:

a diode connected electrically across the electrodes and residing in both said first and said second resonant diverting paths.

18. The arc diverter of claim 16 wherein said detector further comprises:

a counter for counting the number of times an arc has been detected.

19. The arc diverter of claim 16 wherein the switching network further comprises:

means for assuring that both said pairs of switches are not triggered simultaneously.

20. The arc diverter of claim 16 wherein the switching network further comprises:

means for sensing current flow through said diverting circuit to establish a time duration before the next triggering of said resonant diverting circuit.

21. The arc diverter of claim 16 wherein said detector further includes a comparator for comparing the voltage across the electrodes with a predetermined set voltage and further comprising:

a potentiometer for varying the predetermined set voltage.

22. A method for extinguishing an arc in a glow discharge apparatus comprising the steps of:

detecting an arc between two electrodes of a glow discharge apparatus;

discharging, in response to said detection, a stored charge in a first direction along one of two resonant diverting paths to divert electrical current from the electrodes and extinguish the arc and restore a charge for subsequent discharge in an opposite direction along the other of the two resonant diverting paths; and

alternating the direction of discharge and the path of current diversion upon each subsequent detection of an arc between said electrodes.

23. A method for extinguishing an arc in a glow discharge apparatus comprising the steps of:

detecting an arc between two electrodes of a glow discharge apparatus;

discharging, in response to an initial detection, a charged capacitor in a first direction to divert electrical current from the electrodes and extinguish the arc therebetween and recharge the capacitor for subsequent discharge in an opposite direction; and

discharging, in response to the next detection of an arc, the recharged capacitor in said opposite direction to divert electrical current from the electrodes and extinguish the arc therebetween and to again recharge the capacitor for subsequent discharge in said first direction.

24. The method of claim 23 and further comprising the step of:

controlling a first set of switches in a switching network to trigger discharge of the capacitor in said first direction upon initial detection of an arc and also controlling a second set of switches in the switching network to trigger discharge of the capacitor in said opposite direction upon the next detection of an arc; and

alternately triggering said first set of switches and said second set of switches upon each subsequent detection of an arc.

25. The method of claim 24 and further comprising the step of:

counting the number of times an arc has been detected.

26. The combination comprising:

a glow discharge apparatus including two electrodes;

a detector adapted to detect an arc between the electrodes;

a resonant diverting circuit adapted to discharge a stored charge along one of two resonant diverting paths to divert electrical current from said electrodes to extinguish the arc and restore said charge for subsequent discharge along the other of the two resonant diverting paths; and

a switching network actuated by the detector to trigger the resonant diverting circuit to divert the electrical current along a first of the resonant diverting paths upon an initial actuation by the detector, along a second of the paths upon a subsequent actuation by the detector, and to alternate current diversion between the two paths thereafter upon subsequent arc detections.

27. The combination comprising:

a glow discharge apparatus including two electrodes;

a detector adapted to detect an arc between the electrodes;

a switching network actuated by the detector upon detection of an arc;

a resonant diverting circuit including a capacitor and four switches, the capacitor adapted to be electrically isolated in a charged condition between said electrodes by said four switches;

a first pair of said four switches forming part of a first resonant diverting path and adapted to be triggered simultaneously by the switching network upon initial detection of an arc to enable discharge of the capacitor in a first direction to divert electrical current from the electrodes and extinguish the arc and to recharge the capacitor for subsequent discharge in an opposite direction; and

a second pair of said switches forming part of a second resonant diverting path and adapted to be triggered simultaneously by the switching network upon the next detection of an arc to enable discharge of the capacitor in a second direction along the second resonant diverting path to divert electrical current from the electrodes and extinguish the arc and to recharge the capacitor for subsequent discharge in said first direction, said first and second pairs of switches being alternately triggered by said switching network upon subsequent actuations.