Microscopic spectrometer with auxiliary imaging system

• US 5,241,362 A
• Filed: 12/26/1991
• Issued: 08/31/1993
• Est. Priority Date: 12/30/1990
• Status: Expired due to Fees

• Current Assignee: Horiba Limited
• Original Assignee: Horiba Limited
• Inventors: Ukon, Juichiro, Nakata, Yasushi
• Primary Examiner(s): EVANS, FANNIE L
• Application Number:
  US07/813,474
• Time in Patent Office: 614 Days
• Field of Search: 356/326, 356/328
• US Class Current: 356/326
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0229 using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
• CPC Class Codes: G01J 3/10 Arrangements of light sources specially adapted for spectrometry or colorimetry

Abstract

A microscopic spectrometer is disclosed wherein a sample can be irradiated with light from a first light source and either transmitted or reflected through the sample to a spectrometrical measuring system. A half mirror can be detachably provided in the optical system to form two branched optical paths. A second light source can be positioned to irradiate the sample 2 with light through a masking system. The half mirror can transmit the image of the masking system to superimpose it upon the sample and a composite image can then be reflected from the half mirror onto a branched optical path to be observed by the operator. The operator can adjust the actual positions of the masks assembly, while, at the same time, see the entire field of view of the specimen to therefore define in an easy and convenient manner the portion of the specimen to be tested. The respective half mirror and second light source can then be removed prior to performing a spectrometric measurement.

Claims

1. A microscopic spectrometer comprising:

a housing;

means in the housing for mounting a specimen;

means for illuminating the specimen with radiation;

means for focusing the illumination from the specimen to a predetermined position along a first optical path;

sensor means for receiving the illumination from the specimen to provide spectral data on the specimen;

masking means, in the first optical path, for limiting the illumination received from the specimen to that from a predetermined portion of the specimen, the masking means including a variable aperture mechanism for providing an aperture subjectively determined by an observer;

a removable source of light positioned within the first optical path between the masking means and the sensor means, and

a removable half mirror positioned in the first optical path, to provide a second optical path which transmits an image of the aperture onto the specimen and reflects a composite image of the specimen and aperture to the observer along the second optical path.

2. The invention of claim 1 wherein the means for illuminating a specimen with radiation includes a visible light source.

3. The invention of claim 1 wherein the removable light source is positioned on a rear side of the half mirror relative to the specimen.

4. A method of microscopic spectrometry of a sample comprising the steps of:

fixedly supporting a sample;

providing a spectrometric detector with a first optical path extending between the sample and the detector;

varying a size of a masking aperture within the first optical path to define a target size image on the sample;

illuminating the masking aperture with a first source of light within the visible spectrum to enable an operator to align the target size image of the masking aperture on the sample;

viewing a composite image of the sample and the target size image of the masking aperture on the sample;

illuminating the sample with a second source of light in a wavelength range beyond the visible spectrum so that the second source of light passes from the sample through the masking aperture to the spectrometric detector; and

analyzing the light of the second source from the sample after it passes through the masking aperture to provide spectrometric data.