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Micromachined rate and acceleration sensor

  • US 5,241,861 A
  • Filed: 02/08/1991
  • Issued: 09/07/1993
  • Est. Priority Date: 02/08/1991
  • Status: Expired due to Fees
First Claim
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1. Apparatus for measuring the specific force and angular rotation rate of a moving body, comprising:

  • a) an accelerometer having a force sensing axis for producing a first output signal indicative of the acceleration of the moving body along said force sensing axis;

    b) mounting means for mounting said accelerometer such that said accelerometer can be moved along a dither axis perpendicular to said force sensing axis, said mounting means having at least one support surface;

    c) signal generator means for producing a periodic drive signal having a predetermined frequency; and

    d) drive means responsive to said drive signal for imparting a dithering motion to said accelerometer along said dither axis at said predetermined frequency, said drive means comprising a conductive path formed on said support surface and connected to said signal generator means to receive said drive signal therethrough, and means for directing a magnetic flux to cross said conductive path, whereby the interaction of said magnetic flux and drive signal passing through said conductive path causes said accelerometer to vibrate along said dither axis.

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