Component surface distortion evaluation apparatus and method

• US 5,243,665 A
• Filed: 01/22/1992
• Issued: 09/07/1993
• Est. Priority Date: 03/07/1990
• Status: Expired due to Fees

• Current Assignee: FMC Corporation
• Original Assignee: FMC Corporation
• Inventors: Downing, Elizabeth A., Fortunel, Christian, Maney, George A., Christian, Donald J., Lill, Melvin H.
• Primary Examiner(s): Moore, David K.
• Assistant Examiner(s): Johns, Andrew W.
• Application Number:
  US07/826,197
• Time in Patent Office: 594 Days
• Field of Search: 382/8, 358/101, 358/106, 358/107, 356/237, 356/376, 356/377, 395/119, 395/120
• US Class Current: 382/152
• CPC Class Codes: H01L 21/67242 Apparatus for monitoring, sorting or marking testing or measuring during manufacture H01L22/00, marks per se H01L23/544; testing individual semiconductor devices G01R31/26
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection

Abstract

A system is disclosed which operates to collect high resolution three-dimensional surface mesh data from mechanical components which are used for component evaluation. The system includes a multidimensionally movable fixture mount for holding the mechanical components. A structured light pattern emitting projector is provided together with an image sensing camera for detecting impingement of the light pattern on the mechanical component and for generating the surface data. A set of software tools analyzes the data to provide numerical or quantitative component analysis and further presents the data in display form to allow intuitive or qualitative analysis for product and process improvement.

Claims

1. A generic component evaluation system which assumes all evaluated component surfaces have arbitrary distortions, comprised of

a three dimensional graphics workstation comprising a display, a processor and manual data entry means, said processor connected to receive component surface design data,

a metrology cell coupled to said workstation, comprising

multiaxis movable positioner means for holding and positioning the component,

a structured light probe mounted on said positioner means for directing a structured light pattern to impinge on the component surface,

means for reconstructing discontinuities in said structured light pattern within a view of impingement on the component surface,

image acquisition means mounted on said positioner means for viewing impingement of said structured light pattern on the component surface and for obtaining three dimensional surface position data relating thereto wherein all three dimensions are variable substantially throughout one view of impingement of said structured light pattern,

Fourier transform profilometry means for receiving said three dimensional surface position data and for identifying points on the component surface within said one view in three dimensions, and

means for determining the relative positions in space of the component surface and a surface represented by the component surface design data.

2. A generic component evaluation system as in claim 1 wherein said workstation comprises a high graphics bandwidth three dimensional graphics engine, a color display, and a displayed processor function selector.

3. A generic component evaluation system as in claim 1 wherein said multiaxis movable positioner means comprises a component fixture means for holding said component in predetermined position and orientation, mounting means for mounting said component fixture thereon, means for moving said mounting means in at least three dimensions, means for monitoring the position of said mounting means, and means for correcting said three dimensional surface position data for structured light probe and image acquisition means relative orientation and mounting errors.

4. A generic component evaluation system as in claim 1 wherein said structured light probe comprises means for projecting a plurality of collimated parallel light stripes as said structured light pattern.

5. A generic component evaluation system as in claim 1 comprising calibration means mounted in known position relative to said image acquisition means and directed toward the component for resolving ambiguity in said structured light pattern.

6. A generic component evaluation system as in claim 1 comprising data analysis means connected to said workstation for structuring said surface position data from a plurality of components to provide component product and process improvement indications.

7. A generic component evaluation system as in claim 1 wherein said workstation processor comprises means for reducing said surface position data and for driving said display to present said reduced surface position data pictorially, whereby system operator intuitive judgments may be made relative to component design and processing.

8. The generic component evaluation system of claim 1 comprising means for correcting the orientation of and position of said three dimensional surface position data to best fit the component surface design data whereby correction is obtained for component fixture mounting error.

9. A mechanical component three dimensional surface mapping system receiving three dimensional design data for the mechanical component, comprised of

multiaxis positioner means movable in at least three dimensions,

a mechanical component holding means mounted on said multiaxis positioner means,

a structured light probe mounted on said multiaxis positioner means directing a structured light pattern toward said holding means,

means for reconstructing discontinuities in said structured light pattern caused by mechanical component surface discontinuities,

image acquisition means mounted on said multiaxis positioner means for viewing a field of impingement of said light pattern on the surface of the mechanical component and for providing variable three dimensional data relating to the component surface map therefrom, and

computer means coupled to said multiaxis positioner means and said image acquisition means for employing Fourier transform profilometry to identify surface points within said field of impingement in three dimensions and for comparing said surface points with the three dimensional design data to determine the position in space of the component surface relative thereto.

10. A mechanical surface mapping system as in claim 9 wherein said computer means comprises

a first computer means

means for driving said multiaxis positioner means connected to said first computer means,

means for monitoring the position of said multiaxis positioner means connected to said first computer means

a second computer means receiving said surface point identifications for determining the distance between the mechanical component surface and the corresponding surface represented by the design data.

11. A mechanical component three dimensional system as in claim 10 comprising data analysis means connected to said second computer means for structuring said three dimensional surface map data for mechanical component product and process improvement indications.

12. A mechanical component three dimensional surface mapping system as in claim 9 wherein said mechanical component holding means comprises

mechanical component fixture means for holding said mechanical component in predetermined position and orientation, together with means for correcting the orientation and position of said surface map data to best fit the three dimensional design data, whereby correction is obtained for component fixture mounting error.

13. A mechanical component three dimensional surface mapping system as in claim 9 wherein said structured light probe comprises means for projecting a plurality of parallel light stripes as said structured light pattern.

14. A mechanical component three dimensional surface mapping system as in claim 13 comprising a single light stripe projector mounted in known position and orientation relative to said structured light probe and directed toward said mechanical component, thereby resolving light stripe spacing ambiguity.

15. A mechanical component three dimensional surface mapping system as in claim 9 comprising means for calibrating said image acquisition means to remove ambiguity in the view of said structured light pattern.

16. A mechanical component three dimensional surface mapping system as in claim 9 wherein said computer means includes means for processing and displaying said three dimensional surface map data pictorially, whereby system operator intuitive judgments may be made relating to mechanical component processing and design.

17. A generic component evaluation system for a component surface subject to fabrication process induced surface distortions, wherein the system is connected to receive CAD data descriptive of the evaluated component surface and separable into CAD model mesh elements, comprising

planning means connected to said surface mapping means including view selection means for selecting a number of views of the component to be observed, package plan means for selecting predetermined portions of and predetermined CAD models for each view, and packager means for converting between component frame of reference and surface mapping means frame of reference and for storing and ordering location data for CAD model mesh elements in each of said views,

surface mapping means for obtaining at least one view of the component surface and for providing component three dimensional surface measurement data variable in all three dimensions from said at least one view,

evaluation data reduction means for receiving and reducing said component three dimensional surface measurement data from a plurality of evaluated components, and

three dimensional surface measurement data analysis means for receiving said reduced data and for providing analytical data indicative of product and process improvement to reduce the surface distortions.

18. A generic component evaluation system as in claim 17 comprising pathfinding means for efficiently ordering the sequence of said views.

19. A generic component evaluation system as in claim 17 wherein said surface mapping means comprises

multiaxis movable positioner means for holding and positioning the component,

a structured light probe mounted on said positioner means for directing a structured light pattern toward the component,

means for reconstructing discontinuities in said structured light pattern,

image acquisition means mounted on said positioner means for viewing impingement of said structured light pattern on the component and for sensing variable three dimensional surface map data within said at least one view, and

Fourier transform profilometry processing means for receiving said variable three dimensional surface map data and for providing said three dimensional surface measurement data.

20. A generic component evaluation system as in claim 19 wherein said processing means comprises means for correcting said three dimensional surface measurement data for errors induced by relative structured light probe and image acquisition means position and orientation.

21. A generic component evaluation system as in claim 19 comprising communication means for receiving said three dimensional surface measurement data and ideal surface data from said design data and providing corrected surface measurement data to best fit the ideal surface data.

22. A generic component evaluation system as in claim 17 wherein said evaluation data reduction means comprises

qualitative analysis means, and

quantitative analysis means.

23. A generic component evaluation system as in claim 17 wherein said surface data analysis means comprises

means for recalling measurement data for any combination of selected views,

means for recalling measurement data for any individual view, and

means for pictorially displaying said combination of or individual views so that reduced surface measurement data is visually presented.

24. A generic method of three dimensional mapping of a surface on a mechanical part wherein the surface is subject to arbitrary location within design data described limits, comprising the steps of

planning a series of views of portions of the part surface using the design data,

processing the design data to identify sets of selected design model surface mesh elements corresponding to each view and to identify each element'"'"'s limits in two dimensions,

orienting the mechanical part in an approximately known position,

projecting a structured light pattern toward the part surface in each view to obtain variable three dimensional part surface measurement data for a plurality of surface points in each view,

acquiring an image of the light pattern impinging on the part surface in each view,

reconstructing discontinuities in the acquired image of the structured light pattern within each view,

processing the acquired images using Fourier transform profilometry techniques to obtain variable three dimensional part surface measurements for each view,

correcting the three dimensional part surface measurements to best fit the selected design model surface mesh elements,

processing the corrected three dimensional part surface measurement data comparatively with the design model surface mesh elements to identify correspondence between the plurality of surface points and design model mesh elements, and

calculating the distance between each measured surface point and the corresponding design model mesh element, whereby part skin depth is determined relative to the selected design model.

25. A generic method as in claim 24 wherein the design data is CAD data, comprising the step of

selecting a predetermined CAD model and portions thereof to be utilized in said planning step.

26. A generic method of mapping a part surface as in claim 24 wherein the step of orienting the mechanical part comprises the step of adjusting the part position about a plurality of adjustment axes and correcting the three dimensional part surface measurement data for orientation and position errors imposed in the steps of projecting and acquiring.

27. A generic method as in claim 24 comprising

arranging the series of views in a sequence to provide efficiency of movement during the probing step.

28. A generic method of mapping a part surface as in claim 24 wherein structure is provided for performing the steps of orienting and probing, comprising the steps of

displaying the design model and the orienting and projecting structure models simultaneously,

simulating a sequence of the views,

checking for collisions between any of the models, and

storing the simulated sequence that displays no collisions for use in the step of acquiring images in the planned series of views.

29. A generic method as in claim 24 comprising the step of correcting the surface measurement data for optical error.

30. A generic method as in claim 24 wherein the step of projecting a structured light pattern comprises the step of projecting a plurality of parallel light stripes, together with the step of resolving the ambiguity created by the pattern with a single rangefinding line.

31. A generic method of mapping a part surface as in claim 24 wherein the steps of orienting and projecting are performed in different coordinate systems and wherein the step of processing the acquired images comprises the step of transforming the design model mesh elements and the part surface measurement data into the structured light pattern coordinate system.

32. A generic method as in claim 24 comprising the step of

computing summary statistics of the calculated distances to compare with skin depth trend limits.

33. A generic method as in claim 24 comprising the step of

computing the distortion of the part within a view from the calculated distances.

34. A generic method as in claim 24 comprising the step of

computing the displacement of the part within a view from the calculated distances.

35. A generic method as in claim 24 comprising the steps of

computing skin depth trend limits, part distortion and part surface displacement from the calculated distances, and

evaluating the part fabrication process with reference to the computations whereby process change is implemented to optimize the mechanical part surface within prescribed design data limits.

36. A generic method as in claim 24 comprising the step of

analyzing the calculated distance data obtained from a plurality of views, and

displaying the analyzed data as a geometric model, whereby intuitive design alterations ar readily observable.

37. A generic method as in claim 24 comprising the step of

analyzing the calculated distance data obtained from a single view, and

displaying the analyzed data as a geometric model, whereby intuitive design alterations are readily observable.

38. A generic method as in claim 24 wherein the step of processing the acquired images comprises

obtaining raw three dimensional measurement data, further comprising the step of

adjusting the raw three dimensional data with calibration data for optoelectrical structure view angle and lens distortion, and corresponding the raw three dimensional measurement data with ones of the design model surface mesh elements.