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Anti-reflective transparent coating

  • US 5,245,468 A
  • Filed: 12/14/1990
  • Issued: 09/14/1993
  • Est. Priority Date: 12/14/1990
  • Status: Expired due to Fees
First Claim
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1. An anti-reflective coating comprising an Si1-x Hx film and a silicon dioxide film over the Si1-x Hx film, x being a positive number less than 0.4, the anti-reflective coating having a transmittance of at least 50% to visible light.

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