Multilayer piezoelectric actuator stack and method for its manufacture
First Claim
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1. A method of manufacturing a multilayer piezoceramic actuator stack comprising the steps of:
- (a) forming leaves or tiles of piezoceramic in a plastic state by casting a layer of ceramic on a tape supporting a ceramic impregnated ribbon of wire or filament fabric, at least one edge of tape and ribbon being made flush together, laminating said ribbon and said tape cast ceramic layer together, drying said laminate, and cutting said laminate to thereby form said leaves or tiles;
(b) forming electrode material in fugitive or permanent state to be interposed between said piezoceramic tiles, said electrode material being in a given pattern provided with boundary discontinuities to define electrode free regions between said tiles;
(c) piling over each other a plurality of tiles and electrode material to thereby form a stack comprising, in alternating succession, even and odd-numbered electrodes interposed between piezoceramic layers, all even-numbered electrodes forming a first group, all odd-numbered electrodes forming another group, and said electrode pattern with boundary discontinuities of said electrodes of said first group being in reciprocal opposite configuration to said electrode pattern of said another group in a final actuator structure;
(d) pressing said stacked leaves into a compact block to effect integral binding of said tiles within said stack;
(e) firing to sinter said block and, when said electrode material is fugitive, volatilizing said fugitive electrode material thus providing voids in said ceramic in a form of said electrode pattern;
(f) filling discontinuities to become electrode free regions with pressure resistive material and, when voids in said form of said electrode pattern are present, infiltrating said voids with molten metal to thereby form final electrodes having said pattern;
(g) connecting said even-numbered electrodes to a common electric collector and said odd-numbered electrodes to another common collector electrode, said collector electrodes being applied over opposite sides of said stack block.
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Abstract
Multilayer piezoactuators are made by stacking and pressing alternating layers of piezoceramic material and interdigital electrode material. The electrode structure is provided with pressure protected boundary discontinuities which form areas in which electrodes edges do not make contact with the common electrical collectors of the piezoactuators and in which the piezoceramic layers are prevented from touching one another.
132 Citations
6 Claims
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1. A method of manufacturing a multilayer piezoceramic actuator stack comprising the steps of:
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(a) forming leaves or tiles of piezoceramic in a plastic state by casting a layer of ceramic on a tape supporting a ceramic impregnated ribbon of wire or filament fabric, at least one edge of tape and ribbon being made flush together, laminating said ribbon and said tape cast ceramic layer together, drying said laminate, and cutting said laminate to thereby form said leaves or tiles; (b) forming electrode material in fugitive or permanent state to be interposed between said piezoceramic tiles, said electrode material being in a given pattern provided with boundary discontinuities to define electrode free regions between said tiles; (c) piling over each other a plurality of tiles and electrode material to thereby form a stack comprising, in alternating succession, even and odd-numbered electrodes interposed between piezoceramic layers, all even-numbered electrodes forming a first group, all odd-numbered electrodes forming another group, and said electrode pattern with boundary discontinuities of said electrodes of said first group being in reciprocal opposite configuration to said electrode pattern of said another group in a final actuator structure; (d) pressing said stacked leaves into a compact block to effect integral binding of said tiles within said stack; (e) firing to sinter said block and, when said electrode material is fugitive, volatilizing said fugitive electrode material thus providing voids in said ceramic in a form of said electrode pattern; (f) filling discontinuities to become electrode free regions with pressure resistive material and, when voids in said form of said electrode pattern are present, infiltrating said voids with molten metal to thereby form final electrodes having said pattern; (g) connecting said even-numbered electrodes to a common electric collector and said odd-numbered electrodes to another common collector electrode, said collector electrodes being applied over opposite sides of said stack block. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification