Erbium doped optical devices

• US 5,249,195 A
• Filed: 06/30/1992
• Issued: 09/28/1993
• Est. Priority Date: 06/30/1992
• Status: Expired due to Term

• Current Assignee: American Telephone & Telegraph Company (AT&T, Inc.)
• Original Assignee: AT&T, Inc.
• Inventors: Jacobson, Dale C., Vredenberg, Arjen M., Zydzik, George J., Feldman, Leonard C., Wong, Yiu-Huen, Schubert, Erdmann F., Hunt, Neil E. J., Poate, John M.
• Primary Examiner(s): Epps, Georgia Y.
• Application Number:
  US07/906,910
• Time in Patent Office: 455 Days
• Field of Search: 372/45, 372/96, 372/99, 372/49
• US Class Current: 372/45.01
• CPC Class Codes: H01S 3/0604 in the form of a plate or disc
• CPC Class Codes: H01S 3/0627 the resonator being monolithic, e.g. microlaser
• CPC Class Codes: H01S 3/1608 erbium
• CPC Class Codes: H01S 3/1628 characterised by a semiconducting matrix
• CPC Class Codes: H01S 3/176 silica or silicate glass
• CPC Class Codes: H01S 3/177 telluride glass

Abstract

This invention embodies an optical device with a Fabry-Perot cavity formed by two reflective mirrors and an active layer which is doped with a rare earth element selected from lanthanide series elements with number 57 through 71. The thickness of the active layer being a whole number multiple of λ/2 wherein λ is the operating, or emissive, wavelength of the device, said whole number being one of the numbers ranging from 1 to 5, the fundamental mode of the cavity being in resonance with the emission wavelength of said selected rare earth element. Cavity-quality factors exceeding Q=300 and finesses of 73 are achieved with structures consisting of two Si/SiO₂ distributed Bragg reflector (DBR) mirrors and an Er-implanted (λ/2) SiO₂ active region. The bottom DBR mirror consists of four pairs and the upper DBR mirror consists of two-and-a half pairs of quarterwave (λ/4) layers of Si and SiO₂. Photoluminescence at room temperature reveals a drastic enhancement of the luminescence intensity of the cavity emitted along the optical axis of the cavity versus the luminescence without the top mirror. The luminescence intensity of the cavity is typically 1-2 orders of magnitudes higher as compared to structures without a cavity. Furthermore, since the emission wavelength and the intensity decrease for off-normal emission angles, the change in emission wavelength can be quantitatively described by assuming that the on-axis component of the optical wave is resonant with the cavity.

Claims

1. A light-emitting device which comprises in an ascending order, a substrate, a bottom reflector mirror, an active layer, and a top reflective layer, said mirrors forming a Fabry-Perot cavity enclosing said active layer,

said active layer is doped with a rare earth element selected from lanthanide series elements with numbers 57 through 71, the thickness of the active layer being a whole number multiple of λ

/2 wherein λ

is the operating (or emission) wavelength of the device, said number being one of the numbers ranging from 1 to 5, the fundamental mode of the cavity being in resonance with the emission wavelength of said selected rare earth element.

2. The light-emitting device of claim 1 in which said rare earth element comprises Erbium.

3. The light-emitting device of claim 1 in which said active layer comprises material selected from the group consisting of SiO₂, Al₂ O₃, phosphosilicate glass, borosilicate glass, borophosphosilicate glass, boron aluminum silicate glass, germanate glass, tellurite glass, fluoride glass, and Si₃ N₄.

4. The light-emitting device of claim 1 in which the material of said active layer comprises material selected from the group consisting of Si, GaAs, InP, GaInAs and GaInPAs.

5. The light-emitting device of claim 1 in which

said mirrors are selected from distributed Bragg reflector (DBR) mirrors, metal mirrors, conductive oxide mirrors, and their combination so as to provide the said fundamental mode of the cavity.

6. The light-emitting device of claim 1 in which

said active layer is selected from glass-like materials and tetrahedrally bonded semiconductor materials,

each of said mirrors comprising a DBR mirror, the DBR mirrors consisting each of a plurality of pairs of layers, the thickness of each layer being equal to λ

/4, one layer of each pair having a higher refractive index than the other, and one layer of each mirror having a certain refractive index being adjacent to the active layer having a different refractive index, which is lower than said certain refractive index,

the number of pairs of layers in the bottom DBR mirror ranging from 2 to 10, and the number of pairs of layers in the top DBR mirror being smaller than the number of pairs of layers in the bottom DBR mirror and ranging from 1 to 4, and

a capping layer on top of the top DBR mirror.

7. The light-emitting device of claim 1 in which the material of said layers of the DBR mirrors is selected from the group consisting of Si, Ge, SiO₂, Al₂ O₃, and TiO₂, such that the two layers in each pair have different refractive indices.

8. The light-emitting device of claim 1 in which the material of said active layer comprises SiO₂.

9. The light-emitting device of claim 1 in which one layer in each pair of layers comprises SiO₂ and another layer in the pair comprises Si.

10. The light-emitting device of claim 1 in which the active layer comprises Si and the layers in the bottom DBR mirror begin with SiO₂ adjacent the substrate and end with Si adjacent the active layer, and

the layers in the top DBR mirror begin with Si adjacent the active layer.

11. The light-emitting device of claim 10 in which the number of pairs of layers in the bottom DBR mirror is 4 and layers in the top mirror is 2.5 with an upper layer acting as the capping layer.

12. The light-emitting device of claim 10 in which said rare earth element comprises Erbium, and said device is capable of spontaneous photoluminescence at wavelength of approximately 1.5 μ

m.

13. A light-emitting device which comprises, in an ascending order, a substrate, a bottom distributed Bragg reflector (DBR) mirror, an active layer, and a top distributed Bragg reflector (DBR) mirror,

said active layer being of a glass-like material doped with a rare earth element selected from lanthanide series elements with numbers 57 through 71, the thickness of the active layer being a whole number multiple of λ

/2 wherein λ

is the operating wavelength of the device, said number being one of the numbers ranging from 1 to 5,

said DBR mirrors consisting each of a plurality of pairs of layers, the thickness of each layer being equal to λ

/4, one layer of each pair having a higher refractive index than the other, and one layer of each mirror having a certain refractive index being adjacent to the active layer having a different refractive index,

the number of pairs of layers in said bottom DBR mirror ranging from 2 to 10, and the number of pairs of layers in said top DBR mirror being smaller than the number of pairs of layers in the bottom DBR mirror and ranging from 1 to 4, and

a capping layer on top of the top DBR mirror.

14. The light-emitting device of claim 13 in which the material of said active layer comprises material selected from the group consisting of silicon dioxide, aluminum oxide, phosphosilicate glass, borosilicate glass, borophosphosilicate glass, germanate glass, tellurite glass, fluoride glass, and Si₃ N₄.

15. The light-emitting device of claim 14 in which the material of said active layer comprises material selected from the group consisting of Si, GaAs, InP, GaInAs and GaInPAs.

16. The light-emitting device of claim 13 in which said rare earth element comprises Erbium.

17. The light-emitting device of claim 13 in which the material of said active layer comprises SiO₂.

18. The light-emitting device of claim 13 which the material of said layers of said DBR mirrors is selected from the group consisting of Si, Ge, SiO₂, Al₂ O₃, and TiO₂, such that the two layers in each pair have different refractive indices.

19. The light-emitting device of claim 13 in which one layer in each pair of layers comprises SiO₂ and another layer in the pair comprises Si.

20. The light-emitting device of claim 13 in which the active layer comprises SiO₂, the layers in said bottom DBR mirror being with SiO₂ adjacent the substrate and end with Si adjacent the active layer, and the layers in said top DBR mirror begin with Si adjacent the active layer.

21. The light-emitting device of claim 20 in which the number of pairs of layers in the bottom DBR mirror is 4.

22. The light-emitting device of claim 20 in which the number of pairs of layers in the top mirror is 2.5 with an upper layer acting as the capping layer.

23. The light-emitting device of claim 13 in which said rare earth element comprises Erbium, and said device is capable of spontaneous photoluminescence at wavelength of approximately 1.5 μ

m.

24. A light-emitting device which comprises, upon a substrate, a bottom reflector mirror, an active layer and a top reflective mirror, said active layer is doped with Erbium, the thickness of the active layer being a whole number multiple of λ

/2, wherein λ

is the operating wavelength of the device, said number being one of numbers ranging from 1 to 5, the fundamental mode of the cavity being in resonance with the emission wavelength of erbium.

25. The light-emitting device of claim 24 in which the material of said active layer comprises SiO₂.

26. The light-emitting device of claim 24 in which each of said mirror is a distributed Bragg reflector mirror consisting each of a plurality of pairs of layers, one layer of each pair having a higher index of refraction than the other layer of the pair, the thickness of each layer being λ

/4, the number of pairs of layers in one DBR mirror ranging from 2 to 10, and the number of pairs of layers ranging from 1 to 4.

27. The light-emitting device of claim 26 in which one layer in each pair of layers comprises SiO₂ and another layer in each pair comprises Si.

28. The light-emitting device of claim 27 in which the material of the active layer comprises SiO₂, the bottom DBR mirror has 4 pairs of layers and the top DBR mirror has 2.5 pairs of layers with the uppermost layer of the top mirror acting as a capping layer.