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Pressure gauge

  • US 5,249,469 A
  • Filed: 01/17/1991
  • Issued: 10/05/1993
  • Est. Priority Date: 05/17/1988
  • Status: Expired due to Fees
First Claim
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1. A pressure gauge comprising:

  • a hollow volume having a surrounding wall;

    a pressure sensor means having a substantially flat shape, said pressure sensor means comprising a substantially non-flexible supporting plate and a flexible diaphragm attached to said supporting plate, in order to define a closed space between said supporting plate and said diaphragm, said closed space containing a reference pressure, the bending or deflecting of said diaphragm being sensed by means of electrodes located on said diaphragm and/or said supporting plate, said electrodes having connecting leads;

    wherein said pressure sensor means further is located in said hollow volume, which is connected to the pressure to be measured in such a way that a fluid connection is present between said volume at its surfaces, whereby both the exterior surface of said diaphragm and the exterior surface of said supporting plate are influenced by the same pressure;

    said pressure sensor means is attached to a wall of said hollow volume only by means of at least one tube, the sectional area of which is small in relation to the area of the large surfaces of the supporting plate and of said diaphragm of said pressure sensor means; and

    said connecting leads to the sensing electrodes of the pressure sensor means pass inside said tube or tubes.

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