Pressure gauge
First Claim
1. A pressure gauge comprising:
- a hollow volume having a surrounding wall;
a pressure sensor means having a substantially flat shape, said pressure sensor means comprising a substantially non-flexible supporting plate and a flexible diaphragm attached to said supporting plate, in order to define a closed space between said supporting plate and said diaphragm, said closed space containing a reference pressure, the bending or deflecting of said diaphragm being sensed by means of electrodes located on said diaphragm and/or said supporting plate, said electrodes having connecting leads;
wherein said pressure sensor means further is located in said hollow volume, which is connected to the pressure to be measured in such a way that a fluid connection is present between said volume at its surfaces, whereby both the exterior surface of said diaphragm and the exterior surface of said supporting plate are influenced by the same pressure;
said pressure sensor means is attached to a wall of said hollow volume only by means of at least one tube, the sectional area of which is small in relation to the area of the large surfaces of the supporting plate and of said diaphragm of said pressure sensor means; and
said connecting leads to the sensing electrodes of the pressure sensor means pass inside said tube or tubes.
1 Assignment
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Accused Products
Abstract
A pressure gauge is provided comprising a sensor housing (1) closed by a cover (7). The sensor housing (1) is connected to a tube (3) containing the pressure to be measured. The space defined by the sensor housing (1) and the cover (7) is hermetically divided by a sensor housing cover (9) in such a way that inside a front measurement volume (11) a pressure sensor means (15) is placed. This pressure sensor means has a substantially flat shape. It is connected to the interior walls of the front volume by means of tubes (23) which are slender or slim, that is have a small section in relation to the area of the pressure sensor means (15). The carrying means (23) are preferably realized as metal tubes and in their interior the electrical connections (31) for the pressure sensor means pass. By this construction the exterior surface of the whole of the pressure sensor means (15) will be subjected to the measuring pressure. Further an attachment to the pressure sensor housing is provided only allowing a slight convection of heat and in addition the measuring volume does not contain any chemically unstable materials. The electrical connections are also well protected against corrosion by the measurement medium and obtain an electrical shielding.
26 Citations
20 Claims
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1. A pressure gauge comprising:
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a hollow volume having a surrounding wall; a pressure sensor means having a substantially flat shape, said pressure sensor means comprising a substantially non-flexible supporting plate and a flexible diaphragm attached to said supporting plate, in order to define a closed space between said supporting plate and said diaphragm, said closed space containing a reference pressure, the bending or deflecting of said diaphragm being sensed by means of electrodes located on said diaphragm and/or said supporting plate, said electrodes having connecting leads; wherein said pressure sensor means further is located in said hollow volume, which is connected to the pressure to be measured in such a way that a fluid connection is present between said volume at its surfaces, whereby both the exterior surface of said diaphragm and the exterior surface of said supporting plate are influenced by the same pressure; said pressure sensor means is attached to a wall of said hollow volume only by means of at least one tube, the sectional area of which is small in relation to the area of the large surfaces of the supporting plate and of said diaphragm of said pressure sensor means; and said connecting leads to the sensing electrodes of the pressure sensor means pass inside said tube or tubes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A pressure gauge comprising:
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a hollow volume having a surrounding wall; a pressure sensor means having a substantially flat shape, said pressure sensor means comprising a supporting plate and a flexible diaphragm attached to said supporting plate, the bending or deflection of said diaphragm being sensed by means of electrodes located on said diaphragm and/or said supporting plate, said electrodes having connecting leads; said pressure sensor means further being located in said hollow volume, which is connected to the pressure to be measured; wherein said pressure sensor means is attached to a wall of said hollow volume only by means of at least one unitary metal tube, the sectional area of which is small in relation to the area of the large surfaces of said supporting plate and of said diaphragm of said pressure sensor means; said connecting leads to the sensing electrodes of the pressure sensor means pass inside said tube or tubes; whereby the tube or tubes will only negligibly influence the thermal balance of said pressure sensor means, impose negligible mechanical stresses on said pressure sensor means and also act as an electrical shielding of said connecting leads. - View Dependent Claims (12, 13, 14, 15)
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16. A pressure gauge comprising;
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a hollow volume having a surrounding wall; a pressure sensor means having a substantially flat shape, said pressure sensor means comprising a supporting plate and a flexible diaphragm attached to said supporting plate, the bending or deflection of said diaphragm being sensed by means of electrodes located on said diaphragm and/or said supporting plate, said electrodes having connecting leads; said pressure sensor means further being located in said hollow volume, which is connected to the pressure to be measured; wherein said pressure sensor means is attached to a wall of said hollow volume only by means of at least two tubes, arranged at said supporting plate of said pressure sensor means having their axes essentially perpendicular to the surface of said supporting plate and adjacent to the outer borders of said supporting plate; and said connecting leads to the sensing electrodes of said pressure sensing means pass inside said tube or tubes. - View Dependent Claims (17, 18, 19, 20)
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Specification