Electrolytic pump
First Claim
1. An electrolyte pump apparatus adapted for use with an in-tank electrochemical sensor wherein said sensor includes at least one sensing electrode, said electrolytic pump apparatus comprising:
- an electrode chamber having a top end and a bottom end through which electrochemical fluid is passed from said bottom end to said top end;
at least two pumping electrodes located within said electrode chamber and above said sensing electrode; and
control means for applying sufficient voltage to said pumping electrodes such that at least one of said electrodes is positively charged relative to the electrochemical fluid while at least one of the other electrodes is negatively charged relative to the electrochemical fluid, wherein said charged pumping electrodes electrolyze the electrochemical fluid within said electrode chamber to produce a gaseous stream within said electrode chamber, said gaseous stream flowing toward said electrode chamber top end to thereby provide for movement of fluid through said electrode chamber while preventing said gaseous stream from interfering with the sensing electrode measurements.
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Abstract
An apparatus and method for producing an adjustable constant flow of electrochemical fluid. The apparatus is designed for use in an in-tank electrochemical plating bath sensor. The apparatus and method utilize pumping electrodes placed within an electrode chamber. An electrical potential is applied to the electrodes to produce a gaseous stream which produces vertical movement of the electrochemical fluid through the electrode chamber. The voltage applied to the electrodes is periodically reversed in order to prevent the buildup of metal deposits.
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Citations
15 Claims
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1. An electrolyte pump apparatus adapted for use with an in-tank electrochemical sensor wherein said sensor includes at least one sensing electrode, said electrolytic pump apparatus comprising:
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an electrode chamber having a top end and a bottom end through which electrochemical fluid is passed from said bottom end to said top end; at least two pumping electrodes located within said electrode chamber and above said sensing electrode; and control means for applying sufficient voltage to said pumping electrodes such that at least one of said electrodes is positively charged relative to the electrochemical fluid while at least one of the other electrodes is negatively charged relative to the electrochemical fluid, wherein said charged pumping electrodes electrolyze the electrochemical fluid within said electrode chamber to produce a gaseous stream within said electrode chamber, said gaseous stream flowing toward said electrode chamber top end to thereby provide for movement of fluid through said electrode chamber while preventing said gaseous stream from interfering with the sensing electrode measurements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for pumping electrochemical fluid, said method comprising:
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providing an electrode chamber having a top end and a bottom end through which electrochemical fluid is passed from said bottom end to said top end; providing at least two pumping electrodes located within said electrode chamber and within an in-tank electrochemical sensor, said in-tank electrochemical sensor including at least one sensing electrode wherein said pumping electrodes are located above said sensing electrode; and applying a sufficient voltage to said pumping electrodes such that at least one of said electrodes is positively charged relative to the electrochemical fluid while at least one of the other electrodes is negatively charged relative to the electrochemical fluid, wherein said voltage applied to said pumping electrodes is sufficient to electrolyze the electrochemical fluid within said electrode chamber to produce a gaseous stream within said electrode chamber, said gaseous stream flowing toward said electrode chamber top end to thereby provide for movement of fluid through said electrode chamber, while preventing said gaseous stream from interfering with the sensing electrode measurements. - View Dependent Claims (11)
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- 12. The method of claim 16 wherein the polarity of each of the pumping electrodes is periodically switched between positive and negative.
- 13. The method of claim 16 wherein the velocity of electrochemical fluid flow through said electrode chamber is adjusted by varying the current applied to said pumping electrodes.
Specification