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Capacitive acceleration sensor with free diaphragm

  • US 5,253,526 A
  • Filed: 05/22/1991
  • Issued: 10/19/1993
  • Est. Priority Date: 05/30/1990
  • Status: Expired due to Fees
First Claim
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1. An acceleration sensor comprising:

  • a first stationary substrate having a first central junction pad and a first peripheral stationary electrode of an annular shape surrounding the first central junction pad;

    a second stationary substrate having a second central junction pad and a second peripheral stationary electrode of an annular shape which surrounds the second central junction pad and which is opposed to the first peripheral stationary electrode with a given spacing;

    an electrically conductive diaphragm having a central segment fixed in the spacing between the pair of first and second junction pads and a peripheral segment of an annular shape surrounding around and extending resiliently from the central segment to undergo a displacement in the spacing relative to the first and second peripheral stationary electrodes in response to an external acceleration force;

    a pair of spacers composed of thin metal plates having an identical shape and an identical thickness with each other, and being disposed between respective ones of the first and second central junction pads and the central segment of the diaphragm to sandwich the same such as to provide an electrical path from the peripheral segment to either of the first and second central junction pads, anda coupling member passing through the central segment for securing a superposed structure of the diaphragm, the pair of spacers, and the pair of first and second stationary substrates with each other.

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