Scanning microscope comprising force-sensing means and position-sensitive photodetector

• US 5,254,854 A
• Filed: 11/04/1991
• Issued: 10/19/1993
• Est. Priority Date: 11/04/1991
• Status: Expired due to Term

• Current Assignee: American Telephone & Telegraph Company (AT&T, Inc.)
• Original Assignee: AT&T, Inc.
• Inventors: Betzig, Robert E.
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Lee, John R.
• Application Number:
  US07/787,298
• Time in Patent Office: 715 Days
• Field of Search: 250/234, 250/235, 250/216, 250/227.2, 250/227.26, 250/306, 250/307, 359/368, 359/385, 385/12, 324/158 R, 324/244
• US Class Current: 250/234
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 10/06 Circuits or algorithms therefor
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 60/06 SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01Q 60/26 Friction force microscopy
• CPC Class Codes: Y10S 977/868 with optical means

Abstract

A scanning, imaging system is described. A probe having a fine tip is disposed adjacent the surface of a sample and scanned in a pattern lying in a plane substantially parallel to the surface. Means are provided for oscillating the probe tip, substantially within the scanning plane. Shear forces, acting upon the probe tip in a substantially lateral direction, cause changes in the oscillation of the probe tip. Such changes are detected by a position-sensitive photodetector.

Claims

1. A system for scanning at least a portion of the surface of a sample, the system comprising:

a probe having a longitudinal axis and a tip;

means for positioning the probe tip adjacent the surface;

means for displacing the probe tip relative to the surface such that a scan pattern is described in a plane, to be referred to as the "scanning plane," which lies substantially parallel to the surface portion; and

means for oscillating the probe tip relative to the surface at least at one oscillation frequency, characterized in that

the oscillating means are adapted to oscillate the probe tip substantially within the scanning plane; and

the system further comprises;

a position-sensitive photodetector; and

means for optically imaging the probe tip onto the position-sensitive photodetector such that changes in the oscillation of the probe tip can be detected.

2. The system of claim 1, wherein the scanning plane is substantially perpendicular to the longitudinal axis.

3. The system of claim 1, wherein the probe comprises a tapered, terminal portion of an optical fiber having first and second ends, the first end substantially coextensive with the probe tip.

4. The system of claim 3, further comprising a light source and means for coupling light from the source into the second fiber end.

5. The system of claim 3, wherein at least the tapered terminal portion of the optical fiber is coated with a material which is opaque to at least some wavelengths of electromagnetic radiation which can be guided in the optical fiber.

6. The system of claim 3, wherein the optical fiber is a single-mode fiber.

7. The system of claim 1, wherein the probe has at least one mechanical resonant frequency, and the oscillating means are adapted to oscillate the probe at or near the resonant frequency.

8. The system of claim 7, wherein the resonant frequency corresponds to a local maximum oscillatory amplitude of the probe tip with respect to variations of the oscillation frequency, the oscillating means are adapted to oscillate the probe at a frequency which corresponds to an amplitude about 70% of the local maximum, the position-sensitive detector produces an output signal, and the system further comprises a phase-sensitive detector which receives the output signal and processes it such that changes in the amplitude of the probe oscillations may be detected.

9. The system of claim 7, wherein the resonant frequency corresponds to a local maximum oscillatory amplitude of the probe tip with respect to variations of the oscillation frequency, the oscillating means are adapted to oscillate the probe at a frequency which corresponds to an amplitude approximately equal to the local maximum, the position-sensitive detector produces an output signal, and the system further comprises a phase-sensitive detector which receives the output signal and processes it such that changes in the phase of the probe oscillations may be detected.

10. The system of claim 1, wherein the position-sensitive detector produces an output signal, and the system further comprises a phase-sensitive detector which receives the output signal and processes in such that changes in the amplitude and/or the phase of the probe oscillations may be detected.

11. The system of claim 1, wherein the probe has a spring constant, relative to the oscillatory tip displacements, which is no more than about 1000 N/m.

12. The system of claim 1, wherein the position sensitive photodetector produces an output signal, and the system further comprises:

a) means for deriving a feedback signal from the output signal; and

b) means for controlling the distance between the probe tip and the sample surface such that the feedback signal is maintained substantially constant while the probe tip is being displaced in a scan pattern.

13. The system of claim 12, further comprising means for deriving a video display signal from the output signal or the feedback signal;

and video display means for displaying a two-dimensional image which represents the video display signal.

14. A near-field scanning optical microscope which comprises an optical fiber having first and second ends and a tapered terminal portion including the first end, means for positioning the first end adjacent a surface of a sample, and means for displacing the first end relative to the sample in a raster pattern lying in a plane, to be referred to as the "scanning plane," substantially parallel to a portion of the surface such that the surface portion is scanned, the microscope further comprising:

a) means for oscillating the probe tip relative to the surface, the direction of the oscillations lying substantially within the scanning plane;

b) a position-sensitive photodetector capable of producing an output signal;

c) means for optically imaging the probe tip onto the position-sensitive photodetector such that at least some changes in the oscillation of the probe will cause changes in the output signal;

d) means for deriving a feedback signal from the output signal; and

e) means for controlling the distance between the first end and the sample surface such that the feedback signal is maintained substantially constant while the first end is being displaced in a raster pattern.

15. A method for manufacturing an article, comprising the steps of:

a) providing a multiplicity of semiconductor bodies, each semiconductor body having a surface to be patterned;

b) setting at least one process parameter;

c) processing at least a first semiconductor body according to the process parameter such that a pattern is formed on the surface of the semiconductor body, the pattern having a characteristic dimension;

d) measuring the characteristic dimension in the first semiconductor body;

e) comparing the characteristic dimension to a predetermined range of values;

f) if the characteristic dimension lies outside the predetermined range of values, changing the process parameter to bring the characteristic dimension within the predetermined range of values;

g) after (f), processing at least a second semiconductor body according to the process parameter; and

h) performing, on at least the second semiconductor body, at least one additional step toward completion of the article, characterized in that

the measuring step comprises situating, adjacent a portion of the surface, a probe having a tip;

displacing the probe tip relative to the surface such that a scan pattern is described in a plane, to be referred to as the "scanning plane", which lies substantially parallel to the surface portion;

oscillating the probe tip, relative to the surface, such that the oscillations lie substantially within the scanning plane;

optically imaging the probe tip onto a position-sensitive photodetector which produces an output signal; and

processing the output signal such that changes in the oscillation of the probe tip are detected.