Semiconductor laser with vertical resonator
First Claim
1. A semiconductor laser device comprising a semiconductor substrate and a vertical resonator constructed on the substrate, the vertical resonator comprising:
- a first reflector mirror region which comprises a multilayer laminate mirror formed on a surface of said substrate;
an active layer which comprises a double heterojunction and is formed on said first reflector mirror region; and
a second reflector mirror region comprising a multilayer laminate mirror formed on said active region, a phase grating layer which has a periodical structure in a plane parallel to a transversal plane with a period not longer than the laser oscillation wavelength and a metal layer which is formed on and in contact with said grating layer.
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Abstract
The invention relates to a semiconductor laser with a resonator constructed on and vertical to a substrate surface. The vertical resonator has a first reflector mirror which is a multilayer laminate mirror formed on the substrate surface, an active region on the first mirror and a second reflector mirror region including a multilayer laminate mirror on the active region and a metal layer at the top. The second mirror region is provided with a phase grating layer which is adjacent to and in contact with the metal layer and has a periodical structure in a direction in a transversal plane with a period not longer than the laser oscillation wavelength. For example, the grating layer is a relief layer having parallel grooves in the upper surface, and the grooves are filled up with a bottom part of the metal layer. The grating layer differentiates the reflectance of the second reflector mirror region depending on the direction of polarization of incident light. Therefore it is possible to emit laser light polarized in a specific direction.
45 Citations
8 Claims
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1. A semiconductor laser device comprising a semiconductor substrate and a vertical resonator constructed on the substrate, the vertical resonator comprising:
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a first reflector mirror region which comprises a multilayer laminate mirror formed on a surface of said substrate; an active layer which comprises a double heterojunction and is formed on said first reflector mirror region; and a second reflector mirror region comprising a multilayer laminate mirror formed on said active region, a phase grating layer which has a periodical structure in a plane parallel to a transversal plane with a period not longer than the laser oscillation wavelength and a metal layer which is formed on and in contact with said grating layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification