Method of manufacturing a precision micro-filter

• US 5,256,360 A
• Filed: 03/25/1992
• Issued: 10/26/1993
• Est. Priority Date: 03/25/1992
• Status: Expired due to Fees

• Current Assignee: Panasonic Corporation Of North America (Panasonic Holdings Corporation)
• Original Assignee: Panasonic Technologies, Inc. (Panasonic Holdings Corporation)
• Inventors: Li, Hong
• Primary Examiner(s): Woo, Jay H.
• Assistant Examiner(s): Smith, Duane S.
• Application Number:
  US07/857,323
• Time in Patent Office: 580 Days
• Field of Search: 264/DIG. 48, 264/DIG. 62, 264/41, 264/49, 264/45.1, 264/44, 264/219, 264/220, 264/221, 264/225, 264/227, 264/299, 264/318
• US Class Current: 264/219
• CPC Class Codes: B01D 29/111 Making filtering elements
• CPC Class Codes: B01D 29/31 Self-supporting filtering elements
• CPC Class Codes: B29C 33/0033 constructed for making articles provided with holes
• CPC Class Codes: B29C 39/02 for making articles of definite length, i.e. discrete articles
• CPC Class Codes: B29L 2031/14 Filters optical filters B29L2011/0066, sieves or screens B29L2031/737
• CPC Class Codes: Y10S 264/48 Processes of making filters

Abstract

A method of manufacturing a precision micro-filter and a micro-filter manufactured thereby is disclosed. A micro-mold is manufactured using micro-machining technology (such as micro-electrical-discharge machining technology, laser-beam micro-machining, electron beam micro-machining) to make a filter mold with a plurality of rod-like protrusions, of the shape, dimensions, and spacing required for the pores of a finished micro-filter. A molding material is placed into the micro-mold, the molding composition is allowed to solidify to form a micro-filter, the passageways of which conform precisely to the rod-like protrusions of the mold. This micro-filter is then separated from the micro-mold.

Claims

1. A method of manufacturing a precision micro-filter, comprising the steps of:

micromachining a mold material to form a micro-filter mold comprising a base and a plurality of protrusions extending substantially perpendicular from said base wherein micromachining includes one of micro-electro-discharge machining, laser-beam micro-machining and electron-beam micro-machining;

introducing a liquid material into the micro-filter mold, said liquid material being a material selected from the group consisting of polymers and ceramics;

allowing the liquid material to solidify and to form the precision micro-filter; and

separating the precision micro-filter from the micro-filter mold.

2. A method of manufacturing a precision micro-filter in accordance with claim 1, wherein the width of each one of said plurality of protrusions is approximately 1 micrometer.

3. A method of manufacturing a precision micro-filter in accordance with claim 1, wherein each one of said plurality of protrusions has a dimensional tolerance of approximately 0.1 microns.

4. A method of manufacturing a precision micro-filter in accordance with claim 1, wherein said micro-filter mold is comprised of a material selected from the group consisting of stainless steel, copper, iron, aluminum, and tungsten.

5. A method of manufacturing a precision microfilter in accordance with claim 1, wherein the liquid material is allowed to solidify so as to form the precision microfilter wherein a plurality of micro openings extends completely through the precision microfilter upon solidification of the liquid material.

6. A method of manufacturing a precision microfilter in accordance with claim 1, wherein the precision microfilter includes a plurality of micro openings and wherein each one of said plurality of micro openings corresponds to a respective one of said plurality of protrusions.

7. A method of manufacturing a precision microfilter in accordance with claim 1, wherein the precision microfilter is separated from the mold without destroying the mold.

8. A method of manufacturing a precision micro-filter in accordance with claim 1, wherein the width of each one of said plurality of protrusions is 1 micrometer.

9. A method of manufacturing a precision micro-filter in accordance with claim 8, wherein each one of said plurality of protrusions has a dimensional tolerance of approximately 0.1 microns.

10. A method of manufacturing a precision micro-filter in accordance with claim 2, wherein each one of said plurality of protrusions has a dimensional tolerance of approximately 0.1 microns.