Sensor for a capacitance pressure gauge
First Claim
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1. A sensor for use in a capacitance vacuum gauge capable of responding to pressure that includes:
- a base element and a diaphragm element both of which are formed of electrically insulating material, said elements being placed in a face-to-face relationship to form a chamber therebetween;
at least two thin metallic film sections provided on the chamber side of the two elements, said film sections being arranged to form two capacitors, each capacitor containing an electrode pair with the electrodes being positioned upon opposing sides of said elements;
first connecting means located inside the chamber for electrically coupling the electrodes on said diaphragm element so that said capacitors are coupled in series;
second connector means passing through the base element for joining the electrodes on said base element to external leads; and
sealing means for sufficiently isolating the chamber from the atmosphere whereby a vacuum may be maintained within the chamber.
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Abstract
A sensor for a capacitance pressure gauge having a diaphragm and a base is formed with a series of thin metallic electrode sections formed on the inside of the diaphragm and base. Electrical connection is made to the base electrode sections through the base and one or two pairs of series connected capacitances are formed with the diaphragm electrodes. No direct electrical connection needs to be made to the diaphragm.
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Citations
6 Claims
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1. A sensor for use in a capacitance vacuum gauge capable of responding to pressure that includes:
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a base element and a diaphragm element both of which are formed of electrically insulating material, said elements being placed in a face-to-face relationship to form a chamber therebetween; at least two thin metallic film sections provided on the chamber side of the two elements, said film sections being arranged to form two capacitors, each capacitor containing an electrode pair with the electrodes being positioned upon opposing sides of said elements; first connecting means located inside the chamber for electrically coupling the electrodes on said diaphragm element so that said capacitors are coupled in series; second connector means passing through the base element for joining the electrodes on said base element to external leads; and sealing means for sufficiently isolating the chamber from the atmosphere whereby a vacuum may be maintained within the chamber. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification