Sensor for a capacitance pressure gauge

• US 5,257,542 A
• Filed: 09/25/1991
• Issued: 11/02/1993
• Est. Priority Date: 10/08/1990
• Status: Expired due to Term

• Current Assignee: INFICON GmbH (Inficon Holding AG)
• Original Assignee: Leybold Aktiengesellschaft
• Inventors: Voss, Gunter
• Primary Examiner(s): WOODIEL, DONALD
• Application Number:
  US07/765,557
• Time in Patent Office: 769 Days
• Field of Search: 73/718, 73/724, 73/706, 73/708, 29/25.01, 29/25.41, 361/283
• US Class Current: 73/724
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass
• CPC Class Codes: G01L 9/125 with temperature compensating means non electric temperature compensating means G01L19/04
• CPC Class Codes: Y10T 29/43 Electric condenser making

Abstract

A sensor for a capacitance pressure gauge having a diaphragm and a base is formed with a series of thin metallic electrode sections formed on the inside of the diaphragm and base. Electrical connection is made to the base electrode sections through the base and one or two pairs of series connected capacitances are formed with the diaphragm electrodes. No direct electrical connection needs to be made to the diaphragm.

Claims

1. A sensor for use in a capacitance vacuum gauge capable of responding to pressure that includes:

a base element and a diaphragm element both of which are formed of electrically insulating material, said elements being placed in a face-to-face relationship to form a chamber therebetween;

at least two thin metallic film sections provided on the chamber side of the two elements, said film sections being arranged to form two capacitors, each capacitor containing an electrode pair with the electrodes being positioned upon opposing sides of said elements;

first connecting means located inside the chamber for electrically coupling the electrodes on said diaphragm element so that said capacitors are coupled in series;

second connector means passing through the base element for joining the electrodes on said base element to external leads; and

sealing means for sufficiently isolating the chamber from the atmosphere whereby a vacuum may be maintained within the chamber.

2. The sensor according to claim 1 wherein four film sections are provided on the vacuum chamber side of the base and diaphragm elements to form two sets of capacitors, and said first connecting means being arranged to electrically connect the capacitors in each set in series.

3. The sensor according to claim 2 wherein two of said film sections on said base element are combined to form a single electrode whereby the base element contains three electrodes, and said metallic film sections on said diaphragm element are combined to form two electrodes which cooperate with the electrodes on the base element to form four series connected capacitors.

4. The sensor according to claim 3 wherein said film sections provided on said diaphragm element form an annular ring-shaped outer electrode positioned about a circular inner electrode, and the film sections provided on said base element include two superimposed crescent-shaped electrodes mounted adjacent to a semicircular shaped electrode.

5. The sensor according to claim 4 further including a temperature dependent resistor positioned within the base element.

6. The sensor according to claim 5 wherein said second connector means includes a plurality of air-tight solder-filled holes that penetrate the base element to couple electrodes on said base element to external leads.