Holder device and semiconductor producing apparatus having same

• US 5,258,047 A
• Filed: 11/29/1991
• Issued: 11/02/1993
• Est. Priority Date: 11/30/1990
• Status: Expired due to Term

• Current Assignee: Renesas Electronics Corporation
• Original Assignee: Hitachi, Ltd.
• Inventors: Kitsunai, Hiroyuki, Tokisue, Hiromitsu, Tsumaki, Nobuo, Inouye, Hiroshi
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): Picardat, Kevin M.
• Application Number:
  US07/800,834
• Time in Patent Office: 704 Days
• Field of Search: 29/25.01, 29/25.02, 29/25.03, 118/500, 118/503
• US Class Current: 29/25.01
• CPC Class Codes: B05B 13/02 Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work B05B13/06 takes precedence
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

A device for holding an object by electrostatic force includes a body made of a dielectric of a low resistivity, such as SiC, and an electrode provided on that surface of the device body facing away from a holder surface, so that a potential difference is produced between the object and the holder surface. A change-over switch for grounding the device body to an earth potential of an ambient environment is provided, so that the dielectric can be rapidly brought into a potential equal to the earth potential.

Claims

1. A holder device for attractively holding an object so as to handle or fix the same, comprising:

a hand body having a holder surface portion for attractively holding the object, at least the holder surface portion of said hand body being made of a dielectric having a resistivity of not more than 10¹⁰ Ω

cm;

an electrode provided on that surface of said hand body facing away from said holder surface portion; and

a voltage generating device for producing a potential difference between said electrode and the object.

2. A holder device according to claim 1, in which said dielectric constituting said hand body is composed of SiC.

3. A holder device according to claim 1, in which an electrically-conductive cover is provided on an outer periphery of said hand body through an insulating ember in such a manner as to cover an outer surface of said hand body, said electrically-conductive cover being grounded to an earth.

4. A holder device according to claim 2, in which a crystal structure of said dielectric belongs to a hexagonal system and is of α

type.

5. A holder device for attractively holding an object, comprising:

a hand body having a holder surface portion for attractively holding the object, at least the holder surface portion of said hand body being made of a dielectric having a resistivity of not more than 10¹⁰ Ω

cm;

an electrode provided on that surface of said hand body facing away from said holder surface portion;

a voltage generating device for producing a potential difference between said electrode and the object;

an electrically-conductive portion for maintaining said object at an earth potential; and

a change-over switch for electrically connecting said electrode to the earth when the object is to be released from said holder surface portion.

6. A holder device according to claim 5, in which said dielectric is composed of α

-type SiC belonging to a hexagonal system in crystal structure.

7. A holder device according to claim 5, in which said dielectric is composed of α

-type SiC belonging to a hexagonal system in crystal structure.

8. A holder device according to claim 5, in which projections are formed on said holder surface portion.

9. A holder device according to claim 5, in which steps formed by recesses and projections are provided on said holder surface portion.

10. A holder device according to claim 5, in which a grip portion is provided at an end portion of said hand body.

11. A holder device according to claim 5, in which a circulating chamber for conducting a cooling medium therethrough is provided in said hand body, there being provided a flow passage for circulating the cooling medium, cooled by a cooler, through said circulating chamber.

12. A holder device according to claim 5, in which a heating element is provided on said hand body.

13. A holder device according to claim 5, in which said hand body is composed of dielectric ceramics, said electrode is composed of electrically-conductive ceramics, and a molded body of said dielectric ceramics and a molded body of said electrically-conductive ceramics are sintered together to provide an integral sintered body.

14. A holder device according to claim 5, in which a film of a material of the same kind as that of the dielectric constituting the body of said device is formed on said holder surface portion.

15. A holder device according to claim 5, in which a capacitor is connected in parallel with said voltage generating device.

16. A holder device according to claim 5, in which a current sensor is connected in series with said voltage generating device.

17. A holder device according to claim 5, in which there is provided an electrically-conductive portion which is adapted to be contacted with the object when said object is attractively held on said holder surface portion, said electrically-conductive portion being at an earth potential.

18. A holder device for attractively holding an object, comprising;

a hand body having a holder surface portion for attractively holding the object, at least the holder surface portion of said hand body being made of a dielectric having a resistivity of not more than 10¹⁰ Ω

cm;

first and second electrodes provided on that surface of said hand body facing away from said holder surface portion;

a first voltage generating device for producing a potential difference between said first and second electrodes;

a second voltage generating device for producing a bias voltage at one of said electrodes having a lower potential; and

means for adjusting the potential of said second voltage generating means so as to bring the potential of the object, held on said holder surface portion, to substantially 0 volt.

19. A holder device according to claim 18, in which there is provided a change-over switch for short-circuiting said first and second electrodes to each other when the object is to be released from said holder surface portion.

20. A semiconductor producing apparatus comprising:

a loader chamber for accommodating a cassette case receiving a semiconductor wafer;

processing chambers for subjecting said semiconductor wafer to treatments including a heat treatment;

an unloader chamber for accommodating said semiconductor wafer subjected to said treatments;

a handling device for attractively holding said semiconductor wafer and for moving said semiconductor wafer;

a vertically-movable shaft moved upward and downward by said handling device;

a swingable arm connected to said vertically-movable shaft via a rotatable shaft; and

a holder device mounted on a distal end of said arm, said holder device comprising (i) a holder portion having a holder surface portion for attractively holding said semiconductor waver, at least the holder surface portion of said holder portion being made of a dielectric having a resistivity of not more than 10¹⁰ cm, (ii) an electrode provided on that surface of said holder portion facing away from said holder surface portion, and (iii) a voltage generating device for producing a potential difference between said electrode and said semiconductor wafer.

21. A semiconductor producing apparatus comprising a microwave radiating device;

and a holder device for attractively holding a wafer in a vacuum chamber, whereby a plasma etching is effected by radiating a microwave from said microwave radiating device;

said holder device comprising (i) a hand body having a holder surface for attractively holding said wafer, the holder surface portion of said hand body being made of SiC, (ii) an electrode provided on that surface of said hand body facing away from said holder surface portion, and (iii) a voltage generating device for producing a potential difference between said electrode and said wafer.

22. A semiconductor producing apparatus comprising an electron gun column;

and a holder device mounted on the XY stage so as to attractively hold a wafer, whereby a circuit pattern is formed on said wafer by an electron beam from said electron gun column;

said holder device comprising (i) a holder portion having a holder surface portion for attractively holding said wafer, at least the holder surface portion of said holder portion being made of a dielectric having a resistivity of not more than 10¹⁰ Ω

cm, (ii) an electrode provided on that surface of said holder portion facing away from said holder surface portion, and (iii) a voltage generating device for producing a potential difference between said electrode and said wafer.

23. A semiconductor producing apparatus according to claim 22, in which a second object attracting mechanism is provided on that surface of said holder device facing away from said holder surface portion, so as to fix said holder device.