Multi-layer thin film structure and parallel processing method for fabricating same
First Claim
Patent Images
1. A structure for receiving electromagnetic radiation having a wavelength and an energy, the structure comprising:
- a substrate which is transparent to the wavelength of the electromagnetic radiation;
a separation layer disposed on said substrate, said separation layer degrading in response to the energy of the electromagnetic radiation; and
a multi-layer interconnect thin film stack disposed on said separation layer.
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Abstract
A method and apparatus for releasing a workpiece from a substrate including providing a substrate which is transparent to a predetermined wavelength of electromagnetic radiation; forming, on the substrate, a separation layer which degrades in response to the predetermined radiation; providing the workpiece on the separation layer; and directing the predetermined radiation at the separation layer through the transparent substrate so as to degrade the separation layer and to separate the workpiece from the substrate.
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Citations
7 Claims
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1. A structure for receiving electromagnetic radiation having a wavelength and an energy, the structure comprising:
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a substrate which is transparent to the wavelength of the electromagnetic radiation; a separation layer disposed on said substrate, said separation layer degrading in response to the energy of the electromagnetic radiation; and a multi-layer interconnect thin film stack disposed on said separation layer. - View Dependent Claims (2, 3, 4, 5)
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6. A structure for receiving electromagnetic radiation having a wavelength and an energy, the structure comprising:
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a substrate which is transparent to the wavelength of the electromagnetic radiation; a separation layer disposed on said substrate, said separation layer degrading in response to the energy of the electromagnetic radiation; a multi-layer interconnect thin film stack disposed on said separation layer; a metal reflecting layer disposed between said separation layer and said stack, said reflecting layer reflecting said radiation; and a ring attached to a top surface of said stack. - View Dependent Claims (7)
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Specification