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Method to form self-aligned gate structures and focus rings

  • US 5,259,799 A
  • Filed: 11/17/1992
  • Issued: 11/09/1993
  • Est. Priority Date: 03/02/1992
  • Status: Expired due to Term
First Claim
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1. A process for the formation of self-aligned gate and focus ring structures around an electron emitter, said process comprising the following steps:

  • planarizing at least one electron emitter overlaid with insulating and conductive layers, said planarizing involving chemical mechanical means; and

    selectively removing said insulating and conductive layers, thereby exposing at least a portion of said electron emitter.

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