Apparatus for the measurement of surface shape

• US 5,260,761 A
• Filed: 12/05/1991
• Issued: 11/09/1993
• Est. Priority Date: 12/07/1990
• Status: Expired due to Fees

• Current Assignee: Siram SPA (Veolia Environnement SA)
• Original Assignee: Ometron Ltd.
• Inventors: Barker, Andrew J.
• Primary Examiner(s): Willis, Davis L.
• Assistant Examiner(s): Keesee, LaCharles
• Application Number:
  US07/803,260
• Time in Patent Office: 705 Days
• Field of Search: 356/4.5, 356/376, 356/375, 356/356, 356/358, 356/380, 356/360
• US Class Current: 356/4.1
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01B 2290/15 Cat eye, i.e. reflection always parallel to incoming beam
• CPC Class Codes: G01B 2290/35 Mechanical variable delay line
• CPC Class Codes: G01B 2290/45 Multiple detectors for detecting interferometer signals
• CPC Class Codes: G01B 9/02065 using a second interferometer before or after measuring interferometer
• CPC Class Codes: G01B 9/02071 by measuring path difference independently from interferometer
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers

Abstract

Apparatus for measuring the shape of a remote surface (10) comprises a laser (2) whose beam is split into a measuring beam (4) and reference beam (5). The reference beam is passed through a path length modulating mechanism (13, 14) to a datum point (18) while the measuring beam (4) is passed to a point (9) on the remote surface. The reflected beams return along the same paths and are combined at beam splitter (6). The interferometric pattern in the combined beams is analysed to determine the path length of the measuring beam while the transverse coordinates of the point (9) are determined from the position of a beam directing mechanism (12). This process is repeated for a number of points on the surface to measure the shape of the surface (10).

Claims

1. A method of measuring the shape of a remote surface relative to a fixed reference datum, comprising:

providing a coherent radiation beam,

splitting the beam into a measuring beam and a reference beam,

directing the measuring beam at a first measurement point on the remote surface,

providing a fixed datum for the reference beam whereby a static optical path length traversed by the reference beam is nominally the same as a path length traversed by the measuring beam,

modulating accurately and repetitively an instantaneous optical path length traversed by one of the reference beam and the measuring beam over a dynamic range,

collecting a portion of the measuring beam reflected back from the remote surface,

collecting a portion of the reference beam reflected back from the datum point,

recombining the reflected portions of the measuring beam and the reference beam,

detecting a variation of interferometric modulation between the measuring beam and the reference beam during a path length modulation cycle,

determining from the detected variation of interferometric modulation a condition when the instantaneous path length of the reference beam is identical to the path length of the measuring beam at a first measurement point,

determining a corresponding path difference between the first measurement point and the fixed reference datum,

determining coordinates of the first measurement point transverse to a measuring beam axis,

moving the measuring beam to a second and subsequent measurement points on the remote surface, and

repeating the above steps for the second and each subsequent measurement point to determine a path difference and transverse coordinates of the second and subsequent measurement points until a desired number of points have been measured on the remote surface.

2. A method as claimed in claim 1, wherein the coherent radiation beam is provided by a short coherence length laser.

3. A method as claimed in claim 1, wherein the coherent radiation beam is invisible, and wherein a separate visual channel is provided to indicate a position of the measuring beam.

4. A method as claimed in claim 1, wherein a plurality of fixed datum points of known separation are provided for the reference beam, and wherein the method includes a step of switching between said plurality of fixed datum points.

11. A method as claimed in claim 2, wherein the coherent radiation beam is invisible, and wherein a separate visual channel is provided to indicate a position of the measuring beam.

12. A method as claimed in claim 2, wherein a plurality of fixed datum points of known separation are provided for the reference beam, and wherein the method includes a step of switching between said plurality of fixed datum points.

13. A method as claimed in claim 3, wherein a plurality of fixed datum points of known separation are provided for the reference beam, and wherein the method includes a step of switching between said plurality of fixed datum points.

5. Apparatus for measuring the shape of a remote surface, comprising:

a source of coherent radiation,

means for splitting a beam from said source into a measuring beam and a reference beam,

beam directing means for directing the measuring beam onto a measurement point on a remote surface,

a fixed datum for the reference beam,

a static optical path length traversed by the reference beam being nominally the same as a path length traversed by the measuring beam,

a dynamic optical path length modulator for varying an instantaneous optical path length one of the reference beam and the measuring beam over a dynamic range,

means for collecting a portion of the measuring beam reflected from the measurement point,

means for collecting a portion of the reference beam reflected from the datum,

means for recombining the reflected portions of the measuring and reference beams,

detector means for detecting a condition in which the instantaneous path length of the reference beam is identical to the instantaneous path length of the measuring beam at the measurement point,

means for determining a corresponding path difference between the measurement point and the fixed datum, and

means associated with the beam directing means for determining coordinates of the measurement point transverse to an axis of the measuring beam.

6. Apparatus as claimed in claim 5, wherein the source of coherent radiation is a short coherence length laser.

7. Apparatus as claimed in claim 5, wherein the fixed datum is a reflector.

8. Apparatus as claimed in claim 5, wherein the dynamic optical path length modulator includes means for varying the path length traversed by the reference beam.

9. Apparatus as claimed in claim 8, wherein said means for determining a corresponding path difference comprises an interferometer system having a long coherence length laser source whose beam traverses an optical path through the dynamic optical path length modulator to measure directly path length variation.

10. Apparatus as claimed in claim 5, wherein said detector means comprises a pair of detectors connected in a differential mode such that on subtraction of signals from the detectors a composite signal of improved quality is obtained.

14. Apparatus as claimed in claim 6, wherein the fixed datum is a reflector.

15. Apparatus as claimed in claim 6, wherein the dynamic optical path length modulator includes a means for varying the path length traversed by the reference beam.

16. Apparatus as claimed in claim 7, wherein the dynamic optical path length modulator includes a means for varying the path length traversed by the reference beam.

17. Apparatus as claimed in claim 6, wherein said detector means comprises a pair of detectors connected in a differential mode such that on subtraction of signals from the detectors a composite signal of improved quality is obtained.

18. Apparatus as claimed in claim 7, wherein said detector means comprises a pair of detectors connected in a differential mode such that on subtraction of signals from the detectors a composite signal of improved quality is obtained.

19. Apparatus as claimed in claim 8, wherein said detector means comprises a pair of detectors connected in a differential mode such that on subtraction of signals from the detectors a composite signal of improved quality is obtained.

20. Apparatus as claimed in claim 9, wherein said detector means comprises a pair of detectors connected in a differential mode such that on subtraction of signals from the detectors a composite signal of improved quality is obtained.