Automatic tip approach method and apparatus for scanning probe microscope
First Claim
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1. A non-contact method of positioning a sensing probe, having vibrating cantilever and tip, from a first position above a target surface comprising the steps of:
- lowering said sensing probe to a second position above said target surface, said second position comprising a region where said sensing probe interacts acoustically with said target surface, andfurther lowering said sensing probe to a third and final position above said target surface, said third position comprising a region where said sensing probe interacts atomically with said target surface.
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Abstract
A non-contact, step-wise method for automatically positioning a sensing probe, having a vibrating cantilever and tip, above a target surface utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.
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Citations
30 Claims
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1. A non-contact method of positioning a sensing probe, having vibrating cantilever and tip, from a first position above a target surface comprising the steps of:
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lowering said sensing probe to a second position above said target surface, said second position comprising a region where said sensing probe interacts acoustically with said target surface, and further lowering said sensing probe to a third and final position above said target surface, said third position comprising a region where said sensing probe interacts atomically with said target surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A non-contact method of automatically positioning a sensing probe, having a vibrating cantilever and tip, above a target surface comprising the steps of:
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lowering said sensing probe to a first position above said target surface using optical focusing; further lowering said sensing probe to a second position above said target surface, said second position comprising a region where said vibrating cantilever interacts acoustically with said target surface, and further lowering said sensing probe to a third and final position above said target surface, said third position comprising a region where said tip interacts atomically with said target surface. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A non-contact method of automatically positioning a sensing probe, having a vibrating cantilever and tip, above a target surface comprising the steps of:
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lowering said sensing probe to a first position above said target surface using optical focusing comprising sensing an optical focal point between said sensing probe and said target surface; further lowering said sensing probe to a second position above said target surface, said second position comprising a region where said vibrating cantilever is acoustically coupled with said target surface, and further lowering said sensing probe to a third and final position above said target surface, said third position comprising a region where Van der Waals forces effect the interaction of said tip with said target surface. - View Dependent Claims (20, 21, 22, 23, 24)
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25. A scanning probe microscope having a sensing probe mounted for non-contact vertical movement, for positioning the sensing probe above a target surface comprising:
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a cantilever having a microminiature tip at one end, and a piezoelectric bimorph at the opposite end, said piezoelectric bimorph providing a means for vibrating said cantilever at a drive frequency, said cantilever carried by said sensing probe; means for monitoring the amplitude of vibration of said vibrating cantilever, and means, in response to said monitoring means, for automatically positioning said sensing probe. - View Dependent Claims (26)
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27. A scanning probe microscope having a sensing probe, including a tip and vibrating cantilever, mounted for non-contact vertical movement, above a target surface, comprising:
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means for monitoring the amplitude of vibration of said vibrating cantilever, and means, responsive to said monitoring means, for automatically lowering said sensing probe in increasingly precise steps. - View Dependent Claims (28, 29, 30)
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Specification