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Micromachine

  • US 5,262,695 A
  • Filed: 01/22/1992
  • Issued: 11/16/1993
  • Est. Priority Date: 01/24/1991
  • Status: Expired due to Term
First Claim
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1. An electrostatic motor, comprising:

  • a semiconductor substrate rotatable around a central axis thereof; and

    at least one drive electrode disposed at a specified position in proximity to said semiconductor substrate;

    said semiconductor substrate having electromagnetic wave-static electricity converters each comprising a p-n junction, said converters being individually disposed at a plurality of angularly-spaced portions around said substrate axis, said drive electrode being opposed to a path through which electromagnetic wave irradiation regions formed on the respective converters move with the rotation of said substrate, an electromagnetic wave traveling channel being disposed at one side of said drive electrode and extending to said irradiation region of said converter adjacent to another one of said converters opposed to said drive electrode, said semiconductor substrate being rotatable by an electrostatic force between a surface portion of said drive electrode and an adjacent surface portion of said converter irradiated with electromagnetic wave through said channel.

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