Multi-wavelength optical thermometry

• US 5,263,776 A
• Filed: 09/25/1992
• Issued: 11/23/1993
• Est. Priority Date: 09/25/1992
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Wickramasinghe, Hemantha K., Abraham, David W., Holber, William M., Logan, Joseph S.
• Primary Examiner(s): Cuchlinski, Jr., William A.
• Assistant Examiner(s): GUTIERREZ, DIEGO F
• Application Number:
  US07/951,280
• Time in Patent Office: 424 Days
• Field of Search: 374/161, 374/127, 374/120, 356/35.5, 356/45, 356/346, 356/360
• US Class Current: 374/161
• CPC Class Codes: G01K 11/00 Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00

Abstract

Multi-wavelength optical thermometry provides for non-contact measurement of the temperature of a sample where the front surface and the back surface of the sample are used in a interferometer to measure changes in optical path length. Laser beams at two different wavelengths are used and the beam phase of the two resultant interference signals is used to unambiguously measure the path length change over a broad temperature range.

Claims

1. A method of optically measuring the temperature of a sample having a front surface and a back surface comprising the steps of:

transmitting a first laser beam having a wavelength λ

₁ and a second laser beam having a wavelength λ

₂, where the sample is transparent at the wavelengths λ

₁ and λ

₂ ;

receiving laser beams reflected from the front surface and the back surface;

separating the reflected beams for generating a first interferometric phase output signal responsive to the reflected beams having a wavelength λ

₁ and a second interferometric phase output signal responsive to the reflected beams having a wavelength λ

₂ ; and

measuring the temperature of the sample responsive to the phase difference between said first interferometric phase output signal and said second interferometric phase output signal.

2. A method of optically measuring the temperature of a sample as set forth in claim 1, wherein the wavelengths differ (λ

₂ -λ

₁) by an amount which results in a single fringe corresponding to the range of temperatures to be measured.

3. A method of optically measuring the temperature of a sample as set forth in claim 1, wherein said sample is a semiconductor wafer.

4. A method of optically measuring the temperature of a sample as set forth in claim 3, wherein said sample comprises silicon and the wavelengths λ

₁ and λ

₂ are approximately 1.5 μ

m.

5. A method of optically measuring the temperature of a sample as set forth in claim 3, wherein said sample comprises silicon and the wavelengths λ

₁ and λ

₂ are approximately 1.3 μ

m.

6. A multi-wavelength optical thermometer comprising:

laser means for emitting a first laser beam having a wavelength λ

₁ and a second laser beam having a wavelength λ

₂ at a sample having a front surface and a back surface, where λ

₁ and λ

₂ are selected so that the sample to be measured is transparent at the wavelength λ

₁ and λ

₂ ;

means for receiving laser beams reflected from the front surface and the back surface;

means for separating said reflected beams for generating a first interferometric phase signal responsive to the reflected beams having a wavelength λ

₁ and a second interferometric phase signal responsive to the reflected beams having a wavelength λ

₂, and

means for determining the phase difference between said first interferometric phase signal and said second interferometric phase signal indicative of the temperature of the sample.

7. A multi-wavelength optical thermometer as set forth in claim 6, wherein the wavelengths differ (λ

₂ -λ

₁) by an amount which results in a single fringe corresponding to the range of temperatures to be measured.

8. A multi-wavelength optical thermometer as set forth in claim 6, wherein said sample is a semiconductor wafer.

9. A multi-wavelength optical thermometer as set forth in claim 8, wherein said semiconductor wafer comprises silicon and the wavelengths λ

₁ and λ

₂ are approximately 1.5 μ

m.

10. A multi-wavelength optical thermometer as set forth in claim 8, wherein said semiconductor wafer comprises silicon and the wavelengths λ

₁ and λ

₂ are approximately 1.3 μ

m.