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Ceramic heater

  • US 5,264,681 A
  • Filed: 02/07/1992
  • Issued: 11/23/1993
  • Est. Priority Date: 02/14/1991
  • Status: Expired due to Term
First Claim
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1. A ceramic heater having a sintered nonoxide ceramic body, which has a heating part and a supporting part, and a heating resistor which is embedded in the heating part of the ceramic body,characterized in that said heating part of said ceramic body is formed of an aluminum nitride based ceramic at least in a core region thereof which is in contact with and encloses said heating element, and that said supporting part is formed of a silicon nitride based ceramic at least in a surface region thereof.

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