Interferential measurement device for at least one direction of measurement
First Claim
1. An interferential measurement device for measuring the relative position of objects in at least a first direction of measurement comprising:
- at least one light source, said light source emitting a light beam having frequency components unable to interfere with one another;
a first scanning grid having grid lines vertically extending to said first direction, said first scanning grid diffracting said light beam emitted by said light source into a first set of diffraction beams;
a material to be measured, said material to be measured having a diffraction structure for receiving said first set of diffraction beams from said grid and generating a second set of diffraction beams in both said first direction of measurement and in a second direction of measurement, said second direction of measurement being perpendicular to said first direction of measurement;
said second set of diffraction beams directed to impinge upon said first scanning grid to generate a resultant set of diffraction beams; and
at least one group of detectors for generating scanning signals, said group of detectors arranged to detect beams deflected at said diffraction structure of said material measure in said first and second direction.
2 Assignments
0 Petitions
Accused Products
Abstract
In an interferential measurement device for at least one direction of measurement for measuring the relative position of objects, the collimated light beam bundle emanating from a light source is split into three diffraction beams in the at least one direction of measurement at a scanning grid. These three diffraction beams are divided into eight diffraction beams at a cross grid of a material measure and in turn come to interference at a scanning grid under renewed diffraction. The resultant diffraction beams fall on detectors for the generation of measured positional values for the at least one direction of measurement. The cross grid of the scale extends diagonally to the at least one direction of measurement and has an effective grid constant de in the direction of measurement, which agrees with the grid constant d of the scanning grid. The detectors are disposed in such a way that only diffraction beams are detected, which were deflected by the cross grid in the X direction of measurement and in the Y direction extending vertically thereto.
19 Citations
24 Claims
-
1. An interferential measurement device for measuring the relative position of objects in at least a first direction of measurement comprising:
-
at least one light source, said light source emitting a light beam having frequency components unable to interfere with one another; a first scanning grid having grid lines vertically extending to said first direction, said first scanning grid diffracting said light beam emitted by said light source into a first set of diffraction beams; a material to be measured, said material to be measured having a diffraction structure for receiving said first set of diffraction beams from said grid and generating a second set of diffraction beams in both said first direction of measurement and in a second direction of measurement, said second direction of measurement being perpendicular to said first direction of measurement; said second set of diffraction beams directed to impinge upon said first scanning grid to generate a resultant set of diffraction beams; and at least one group of detectors for generating scanning signals, said group of detectors arranged to detect beams deflected at said diffraction structure of said material measure in said first and second direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 18, 19, 20, 21, 22, 23)
-
-
16. A measurement device for measuring the relative position of objects in at least two directions of measurement, where a material measurement is scanned by a scanning unit, comprising:
-
at least one reference mark for obtaining at least one reference signal assigned to the material measurement; and at least one reference mark extending longitudinally in the direction of measurement which lies vertically to the direction of measurement assigned to it. - View Dependent Claims (17)
-
-
24. A method for measuring the relative position of an object in at least a first direction of measurement using an interferential measuring device comprising the steps of:
-
emitting a light beam having frequency components unable to interfere with one another; diffracting said light beam emitted by said light source into a first set of diffraction beams; receiving said first set of diffraction beams and generating a second set of diffraction beams in both said first direction of measurement and a second direction of measurement, said second direction of measurement being perpendicular to said first direction of measurement; receiving said second set of diffraction beams and generating a resultant set of diffraction beams; and generating scanning signals by using detectors, said detectors arranged in such a way that only those diffraction beams which ar deflected in said first and said second direction of measurement are detected.
-
Specification