Microchannel plate technology

• US 5,265,327 A
• Filed: 09/13/1991
• Issued: 11/30/1993
• Est. Priority Date: 09/13/1991
• Status: Expired due to Fees

• Current Assignee: Reveo, Inc.
• Original Assignee: Reveo, Inc.
• Inventors: Jain, Kanti, Faris, Sadeg M.
• Primary Examiner(s): Arbes, Carl J.
• Application Number:
  US07/759,391
• Time in Patent Office: 809 Days
• Field of Search: 29/825, 501/61, 501/65, 313/104, 313/105 R
• US Class Current: 29/825
• CPC Class Codes: B01J 19/0093 Microreactors, e.g. miniaturised or microfabricated reactors laboratory containers with capillary fluid transport in microfabricated channels or chambers B01L3/5027
• CPC Class Codes: G02B 6/08 with fibre bundle in form of plate
• CPC Class Codes: H01J 43/246 Microchannel plates [MCP] image amplification tubes using MCP H01J31/507
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing

Abstract

A process for fabricating microchannel plates produces large area microchannel plates that have channel exit openings as small as 0.5 micron, MTF ˜1, pitch-limited resolution (a factor of 10 potential improvement in resolution) and at a cost of $0.40/sq. centimeter, and with funneling controlled as to configuration and exit opening size and shape. Microchannels may be rectangular in cross section, or rectangular, or trapezoidal, or other configuration, including straight sided, chevron or balloon sided. Microchannels of differing configurations may be interspersed, for reasons of alignment or to control pixel characteristics. Material choice may include glass, ceramic, metal, alloy and plastics, plus dopants. This materials flexibility, and the improved geometrical uniformity lead to higher signal-to-noise ratio and lower outgassing, and to a significant improvement in performance. Microchannels are formed in `green` glass/ceramic ribbons using high-precision, low-cost and versatile planar process steps, eliminating the need for the fiber-drawing and chemical-etching. The ribbon of green glass/ceramic powder in a binder and solvent slurry is configured in complementary partial microchannel forming grooves and partially dried to a safe handling condition, then carefully stacked upon a takeup device with precise alignment. The stack is cut into segments for final solidification by heat fusing and curing and sliced, then smoothed and equipped with appropriate ion barrier and electrode layers for use as microchannel plates.

Claims

1. A process for making a microchannel plate, comprising the following steps:

Step 1. Providing a slurry (1) of green solidifiable particles in a binder in a dispensing vessel (2);

Step 2. Dispensing said slurry (1) as a continuous ribbon (5);

Step 3. Treating said continuous ribbon (5) to achieve a smooth dimensioned and state-controlled condition;

Step 4. Configuring said continuous ribbon (5) in a configuring device with a multiplicity of microchannel forming changes of state of dimensions differing from selected dimensions by the predicted expansion/contraction of further processing, to produce a configured continuous ribbon;

Step 5. Treating said configured continuous ribbon (5) in its green microchannel forming condition to achieve a controlled state configured continuous ribbon (5);

Step 6. Laminating a number of layers of controlled state configured ribbon (5) on an alignment-controlled takeup device (18), forming a multi-layer aligned controlled-state configured stack (5);

Step 7. Cutting a section (27) of said multi-layer aligned controlled-state configured continuous ribbon (5) so as achieve a stack (27) of aligned sections;

Step 8. Slicing and solidifying said stack (27) so as to provide a solidified slice (22,23);

Step 9. Smoothing the surfaces of said solidified slice (22,23) to form a smoothed solidified stack (23).

2. The process according to claim 1, with the following additional step:

Step 10. Adding one or more completion films to one or more surfaces of said smoothed solidified slices (23).

3. The process according to claim 1, wherein the microchannel forming changes of state are copolymerization.

4. The process according to claim 1, wherein the microchannel forming changes of state are photoresist activation.

5. The process according to claim 1, wherein the microchannel forming changes of state are by stamping.

6. A process according to claim 1, wherein said Step 4 of configuring said continuous ribbon (5) comprises configuring with asymmetrical channels so as to provide a degree of funneling.

7. A process according to claim 6, wherein said Step 4 of configuring said continuous ribbon (5) comprises configuring the first surface of said continuous ribbon (5) on one side only.

8. A process according to claim 1, wherein said Step 4 of configuring said continuous ribbon (5) comprises configuring the first and second surfaces of said continuous ribbon (5) symmetrically.

9. A process according to claim 1, wherein said Step 8 of slicing and solidifying a section (23) is sequenced so as to slice after heat curing.

10. A process according to claim 1, wherein said Step 8 of slicing and solidifying a section (23) is sequenced so as to slice before heat curing.

11. A process according to claim 1, wherein said Steps 7 and 8 are sequenced so as to solidify before cutting a section.

12. A process according to claim 1, wherein said slurry (1) of green solidifiable powder includes an intermixed dopant powder.

13. A process according to claim 1, wherein said intermixed dopant powder is calculated to increase thermal conductivity of the solidified powder.

14. A process according to claim 1, wherein said takeup device is a rotating spool (18) and the ribbon (5) is continuously wound upon said spool (18).

15. A process according to claim 1, wherein said takeup device is a platform and the ribbon (5) is cut in lengths appropriate to said takeup device.

16. A process according to claim 1, wherein said configuring device is a patterning surface on said first patterning device (10) which configures one surface of the ribbon (5) to a channel-forming pattern.

17. A process according to claim 1, wherein said configuring device is a patterning surface on each of first and second patterning devices (9,10) which configures both surfaces of the ribbon (5) to a channel-forming pattern.

18. A process according to claim 1, wherein said configuring device is a configuring roller set (8).

19. A process according to claim 1, wherein said configuring device is segmented, having a plurality of configurations assigned respectively to a plurality of segments, to achieve an MCP with a plurality of channel configurations interspersed.

20. A process according to claim 11, wherein said configuring device is segmented, having a plurality of configurations assigned respectively to a plurality of segments, to achieve an MCP with a plurality of channel configurations interspersed.

21. A process for making a microchannel plate comprising:

a) forming a ribbon (5) of green solidifiable powder in a binder;

b) pretreating said ribbon (5);

c) configuring said ribbon (5) with partial complementary microchannel forming indentations;

d) stacking said configured ribbon (5) with alignment such that partial complementary microchannel forming indentations align for completion of microchannels configured according to such microchannel forming indentations;

e) heat curing and slicing said configured ribbon (5) so as to result in a solidified fused microchannel plate with microchannels configured according to such microchannel forming indentations; and

f) completing the revised microchannel plate with appropriate films and connections.