Double cantilever sensor for atomic force microscope

• US 5,267,471 A
• Filed: 04/30/1992
• Issued: 12/07/1993
• Est. Priority Date: 04/30/1992
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: O'Boyle, Martin P., Abraham, David W.
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): DOMBROSKE, GEORGE M
• Application Number:
  US07/876,339
• Time in Patent Office: 586 Days
• Field of Search: 73/105, 250/306, 250/307, 250/423 F
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 60/30 Scanning potential microscopy
• CPC Class Codes: G01Q 60/40 Conductive probes
• CPC Class Codes: Y10S 977/852 for detection of specific nanostructure sample or nanostructure-related property
• CPC Class Codes: Y10S 977/863 Atomic force probe

Abstract

An atomic force microscope that performs both atomic force and surface potential measurements on a sample comprises a conductive probe beam that includes two segments, a first segment exhibiting a first mechanical resonant frequency and a second segment exhibiting a second different mechanical resonant frequency. An actuator causes oscillations in the probe beam at the first mechanical resonant frequency. An oscillator applies to the probe beam a signal having a frequency equal to the second mechanical resonant frequency. Due to the potential difference between the probe beam and the sample, a force results that causes the probe beam to vibrate. The probe beam is moved over the sample'"'"'s surface in a direction parallel to the surface. An optical heterodyne system senses movements of the probe beam at both the first and second resonant frequencies and provides an output signal indicative of the second resonant frequency movement of the probe beam'"'"'s second segment. In a further embodiment, second and third harmonics of the second resonant frequency are applied to the probe beam and enable the measurement of capacitance changes between the probe beam and the sample surface and changes in capacitance with respect to voltage over the sample'"'"' s surface.

Claims

1. An atomic force microscope for performing atomic force and surface potential measurements on a sample, the combination comprising:

a conductive probe beam including two segments, a first segment exhibiting a mechanical fundamental resonant frequency of f₁ and a second segment exhibiting a mechanical fundamental resonant frequency of f₂ ;

actuator means mechanically coupled to said probe beam for oscillating said probe beam at said f₁ frequency;

oscillator means electrically connected to said probe beam for applying a signal of frequency f₂ thereto;

means for inducing relative movement between said sample and said probe beam in a direction that is transverse to a surface of said sample; and

means for sensing movements of said probe beam that are orthogonal to the surface of said sample and for providing an output signal indicative of movement of said second segment of said probe beam at said f₂ frequency.

2. The atomic force microscope of claim 1 wherein f₂ is greater than f₁.

3. The atomic force microscope of claim 2 wherein said first segment of said probe has a larger mass and cross section than said second segment.

4. The atomic force microscope of claim 1 further comprising:

feedback means for applying a bias voltage to said probe beam, and responsive to said output signal from said sensing means to change said bias voltage towards a value of surface potential on said sample adjacent said probe beam.

5. The atomic force microscope of claim 4, wherein said sensing means and feedback means comprise:

an interferometer for sensing a laser beam reflected from said second segment of said probe beam;

oscillator means for providing a signal of frequency f₂ ; and

lock-in amplifier means responsive to the output of said oscillator means and to an output from said interferometer that includes an f₂ signal component, to provide said bias voltage.

6. An atomic force microscope for determining characteristics of a sample, comprising:

a conductive probe beam including first and second segments, said first segment exhibiting a mechanical fundamental resonant frequency at f₁ and said second segment exhibiting a mechanical fundamental resonant frequency at f₂, f₂ being greater than f₁ ;

actuator means mechanically coupled to said probe beam for oscillating said probe beam at said f₁ frequency;

oscillator means connected to said probe beam for applying an AC signal thereto, said AC signal having a component frequency of said f₂ frequency; and

interferometric means for sensing movements of said second segment of said probe beam and for providing an output indicative of movements of said second segment at said f₂ frequency.

7. The atomic force microscope as recited in claim 6 wherein said AC signal is equal in frequency to f₂.

8. The atomic force microscope as recited in claim 6 wherein said AC signal exhibits a frequency of f₂ /2.

9. The atomic force microscope as recited in claim 6 wherein said AC signal exhibits a frequency of f₂ /3.

10. The atomic force microscope as recited in claim 7 wherein said interferometer means comprises:

an interferometer for producing a signal including f₂ signal components that are indicative of f₂ frequency vibrations of said second segment;

a lock-in amplifier responsive to said interferometer signal and said AC signal for providing an output indicative of amplitude changes of said interferromer signal that occur at a frequency of said AC signal; and

integrator means for applying a feedback bias to said probe beam in response to said lock-in amplifier'"'"'s output, said integrator means altering said feedback bias in response to said output from said lock-in amplifier so that it is more nearly equal to a surface potential manifested by said sample.

11. An atomic force microscope as recited in claim 8, wherein said interferometer means comprises:

an interferometer for producing a signal including f₂ signal components that are indicative of f₂ frequency vibrations of said second segment; and

a lock-in amplifier responsive to said signal from said interferometer and said f₂ /2 AC signal to provide an output manifesting a level that is proportional to capacitive forces existing between said second segment and said sample.

12. An atomic force microscope as recited in claim 9, wherein said interferometer means comprises:

an interferometer for producing a signal including f₂ signal components that are indicative of f₂ frequency vibrations of said second segment; and

a lock-in amplifier responsive to said signal from said interferometer and said f₂ /3 AC signal to provide an output indicative manifesting a level that is proportional to capacitive changes due charge states in said sample.